CAPACITANCE TYPE PHYSICAL QUANTITY SENSOR
First Claim
1. A capacitive physical quantity sensor comprising:
- a substrate having one surface along a x-y plane, which is defined by a x direction and a y direction perpendicular to each other;
an anchor fixed to the one surface of the substrate;
a detection beam connected to the substrate through the anchor;
a weight connected to the detection beam;
a movable electrode formed in the weight; and
a fixed electrode opposed to the movable electrode on the x-y plane, whereinthe detection beam has flexibility in the y direction;
the movable electrode includes a first movable detection electrode, a second movable detection electrode and a first movable damping electrode;
the fixed electrode includes a first fixed detection electrode, a second fixed detection electrode and a first fixed damping electrode;
the first fixed detection electrode is located separately from the first movable detection electrode in a first y direction and is opposed to the first movable detection electrode in the first y direction, the first y direction being one direction in the y direction;
the second fixed detection electrode is located separately from the second movable detection electrode in a second y direction and is opposed to the second movable detection electrode in the second y direction, the second y direction and the first y direction are opposite directions;
the first movable damping electrode is located at a center between corresponding two of the first fixed damping electrodes and is opposed to one of the corresponding two of the first fixed damping electrodes in the first y direction and is opposed to the other of the corresponding two of the first fixed damping electrodes in the second y direction; and
a plurality of the first movable damping electrodes are located point-symmetrically with respect to the center of the weight, or line-symmetrically with respect to a center line, which passes through the center of the weight in the y direction.
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Accused Products
Abstract
A capacitance type physical quantity sensor including a movable electrode formed in a weight part, and a fixed electrode facing the movable electrode is provided. A first movable sensing electrode and a first fixed sensing electrode face each other in a first y direction. A second movable sensing electrode and a second fixed sensing electrode face each other in a second y direction. A first movable damping electrode is located in the middle between two first fixed damping electrodes, faces one of the first fixed damping electrodes in the first y direction and faces the other of the first fixed damping electrodes in the second y direction. A plurality of the first movable damping electrodes are located point-symmetrically with respect to the center of the weight part or line-symmetrically with respect to a center line passing the center in the y direction.
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Citations
6 Claims
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1. A capacitive physical quantity sensor comprising:
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a substrate having one surface along a x-y plane, which is defined by a x direction and a y direction perpendicular to each other; an anchor fixed to the one surface of the substrate; a detection beam connected to the substrate through the anchor; a weight connected to the detection beam; a movable electrode formed in the weight; and a fixed electrode opposed to the movable electrode on the x-y plane, wherein the detection beam has flexibility in the y direction; the movable electrode includes a first movable detection electrode, a second movable detection electrode and a first movable damping electrode; the fixed electrode includes a first fixed detection electrode, a second fixed detection electrode and a first fixed damping electrode; the first fixed detection electrode is located separately from the first movable detection electrode in a first y direction and is opposed to the first movable detection electrode in the first y direction, the first y direction being one direction in the y direction; the second fixed detection electrode is located separately from the second movable detection electrode in a second y direction and is opposed to the second movable detection electrode in the second y direction, the second y direction and the first y direction are opposite directions; the first movable damping electrode is located at a center between corresponding two of the first fixed damping electrodes and is opposed to one of the corresponding two of the first fixed damping electrodes in the first y direction and is opposed to the other of the corresponding two of the first fixed damping electrodes in the second y direction; and a plurality of the first movable damping electrodes are located point-symmetrically with respect to the center of the weight, or line-symmetrically with respect to a center line, which passes through the center of the weight in the y direction. - View Dependent Claims (2, 3, 4, 5)
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6. A capacitive physical quantity sensor comprising:
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a substrate having one surface along a x-y plane defined by a x direction and a y direction perpendicular to each other; an anchor fixed to the one surface of the substrate; a detection beam connected to the substrate through the anchor; a weight connected to the detection beam; a movable electrode formed in the weight; and a fixed electrode opposed to the movable electrode in a z-direction, which is perpendicular to the x-y plane, wherein; the detection beam has flexibility in the z-direction; the movable electrode includes a first movable detection electrode, a second movable detection electrode and a first movable damping electrode; the fixed electrode includes a first fixed detection electrode, a second fixed detection electrode and a first fixed damping electrode; the first fixed detection electrode is located apart from the first movable detection electrode in a first z-direction being one direction in the z-direction and is opposed to the first movable detection electrode in the first z-direction; the second fixed detection electrode is located apart from the second movable detection electrode in a second z-direction being opposite to the first z-direction and is opposed to the second movable detection electrode in the second z-direction; each of a plurality of the first movable damping electrodes is located at a center between corresponding two of the first fixed damping electrodes, is opposed to one of the corresponding two of the first fixed damping electrodes in the first z direction, and is opposed to the other of the corresponding two of the first fixed damping electrodes in the second z direction; and the plurality of the first movable damping electrodes are located point-symmetrically with respect to a center of the weight, or line-symmetrically with respect to a center line, which pass through the center of the weight in the z-direction.
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Specification