Optical measurement system with polarization compensation, and corresponding method
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Accused Products
Abstract
A method for the adjustment of an optical measurement system comprises providing an optical measurement system, which comprises, as optical elements, a beam splitter; a first photo sensor, exposed by a first partial beam from the beam splitter; an optical filter; a second photo sensor, arranged downstream of the optical filter, exposed by a second partial beam from the beam splitter. Additionally, the angularity and relative position between multiple optical elements is designed to be adjustable. The method further comprises providing a device for generating a difference signal from the two photo sensors; providing a light source with periodically varying polarization; irradiating the light in the beam splitter, so that the two respective photo sensors are exposed by a partial beam; generating a difference signal of the output signals of the photo sensors; varying the position and/or angularity of at least one optical element, and observing the difference signal, determine the combination of angularity/position of the elements where a minimum difference signal is achieved, and configuring the angularity of the optical elements to the determined values. Further, a corresponding system is proposed.
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Citations
20 Claims
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1-10. -10. (canceled)
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11. A Method for the adjustment of an optical measurement system, comprising:
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providing an optical measurement system, which comprises, as optical elements; a beam splitter; a first photo sensor, exposed by a first partial beam from the beam splitter; an optical filter; a second photo sensor, arranged downstream of the optical filter, exposed by a second partial beam from the beam splitter, wherein the angularity and relative position between multiple optical elements is arranged to be adjustable; providing a device for generating a difference signal from the signals of both photo sensors; providing a light source with periodically varying polarization; irradiating the light into the beam splitter, so that both photo sensors are exposed by each respective partial beam; generating a difference signal of the output signals of the photo sensors; varying the position and/or angularity of at least one optical element, and observation of the difference signal; determining the combination of angularity/position of the elements which achieves a minimum difference signal. - View Dependent Claims (12, 13, 14, 15)
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16. A system for polarization-compensated adjustment of an optical measurement system, comprising:
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a beam splitter; a first photo sensor, arranged to be exposed by a first partial beam from the beam splitter; an optical filter, arranged to be exposed by a second partial beam from the beam splitter; a second photo sensor arranged downstream of the optical filter; a light source for light with periodically varying polarization, wherein the polarization is periodically varied by active elements. - View Dependent Claims (17, 18, 19, 20)
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Specification