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FLOW PATH MEMBER, AND HEAT EXCHANGER AND SEMICONDUCTOR MANUFACTURING DEVICE USING SAME

  • US 20150153116A1
  • Filed: 07/29/2013
  • Published: 06/04/2015
  • Est. Priority Date: 07/27/2012
  • Status: Abandoned Application
First Claim
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1. A flow path member comprising:

  • a first wall section;

    a second wall section; and

    a third wall section that is provided between the first wall section and the second wall section,wherein an internal section that is configured by the first wall section, the second wall section, and the third wall section becomes a flow path through which a fluid flows and a plurality of flow path openings of the flow path are arranged in one direction on a cut plane obtained by cutting from the first wall section to the second wall section, andwherein one of two adjacent flow path openings is disposed to be more displaced than the other either toward the first wall section side or toward the second wall section side.

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