SPECTRAL SENSOR
First Claim
1. A spectroscopic sensor comprising:
- an interference filter unit, having a cavity layer and first and second mirror layers opposing each other through the cavity layer, for selectively transmitting therethrough a predetermined wavelength range of light according to an incident position thereof from the first mirror layer side to the second mirror layer side;
a light detection substrate, having a light-receiving surface for receiving the light transmitted through the interference filter unit, for detecting the light incident on the light-receiving surface; and
a separator, extending from the cavity layer to at least one of the first and second mirror layers, for optically separating the interference filter unit as seen in a predetermined direction intersecting the light-receiving surface.
1 Assignment
0 Petitions
Accused Products
Abstract
A spectroscopic sensor 1A comprises an interference filter unit 20A, a light detection substrate 30A, and a separator 15. The interference filter unit 20A has a cavity layer 21 and first and second mirror layers 22, 23 opposing each other through the cavity layer 21 and selectively transmits therethrough a predetermined wavelength range of light according to its incident position from the first mirror layer 22 side to the second mirror layer 23 side. The light detection substrate 30A has a light-receiving surface 32a for receiving light transmitted through the interference filter unit 20A and detects the light incident on the light-receiving surface 32a. The separator 15 extends from the cavity layer 21 to at least one of the first and second mirror layers 22, 23 and optically separates the interference filter unit 20A as seen in a predetermined direction intersecting the light-receiving surface 32a .
-
Citations
11 Claims
-
1. A spectroscopic sensor comprising:
-
an interference filter unit, having a cavity layer and first and second mirror layers opposing each other through the cavity layer, for selectively transmitting therethrough a predetermined wavelength range of light according to an incident position thereof from the first mirror layer side to the second mirror layer side; a light detection substrate, having a light-receiving surface for receiving the light transmitted through the interference filter unit, for detecting the light incident on the light-receiving surface; and a separator, extending from the cavity layer to at least one of the first and second mirror layers, for optically separating the interference filter unit as seen in a predetermined direction intersecting the light-receiving surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
-
Specification