×

MEMS MICROPHONE ELEMENT AND DEVICE INCLUDING SUCH AN MEMS MICROPHONE ELEMENT

  • US 20150156591A1
  • Filed: 12/03/2014
  • Published: 06/04/2015
  • Est. Priority Date: 12/03/2013
  • Status: Active Grant
First Claim
Patent Images

1. An MEMS microphone element, comprising:

  • at least two carrier elements for two electrode sides of a capacitor system, the carrier elements being formed one above another and at a distance from one another in its layered structure for signal detection, wherein;

    at least one of the carrier elements is sound pressure-sensitive,at least one of the electrode sides includes at least two electrode segments that are electrically contactable independent of one another,the electrode segments together with the at least one electrode of the other electrode side form partial capacitances which are independent of one another, anda shape and extension of the electrode segments across a surface are determined by a position and extension of vibration antinodes of a sound pressure-sensitive carrier element when the carrier element is excited to higher mode vibrations using ultrasound of a defined frequency.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×