PHYSICAL QUANTITY MEASURING SENSOR AND SENSOR MODULE
First Claim
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1. A physical quantity measuring sensor comprising:
- a joint having a cylindrical projection in which an introduction hole for introducing a target fluid is formed;
a ceramic sensor module disposed on a downstream side of the projection in a flow direction of the target fluid, the ceramic sensor module comprising;
a diaphragm to be displaced depending on a pressure of the introduced target fluid; and
a cylindrical portion integrated with the diaphragm and provided to the projection; and
an O-ring interposed between the cylindrical portion and the projection, whereinthe O-ring is interposed between a sensor-module flat portion extending in a direction orthogonal to an axial direction of the cylindrical portion and a joint flat portion extending in a direction orthogonal to an axial direction of the projection.
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Abstract
A physical quantity measuring sensor includes: a joint having a projection; a ceramic sensor module including a diaphragm and a cylindrical portion integrated with the diaphragm and provided to the projection; and an O-ring interposed between a sensor-module flat portion extending in a direction orthogonal to an axial direction of the cylindrical portion and a joint flat portion extending in a direction orthogonal to an axial direction of the projection.
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Citations
8 Claims
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1. A physical quantity measuring sensor comprising:
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a joint having a cylindrical projection in which an introduction hole for introducing a target fluid is formed; a ceramic sensor module disposed on a downstream side of the projection in a flow direction of the target fluid, the ceramic sensor module comprising;
a diaphragm to be displaced depending on a pressure of the introduced target fluid; and
a cylindrical portion integrated with the diaphragm and provided to the projection; andan O-ring interposed between the cylindrical portion and the projection, wherein the O-ring is interposed between a sensor-module flat portion extending in a direction orthogonal to an axial direction of the cylindrical portion and a joint flat portion extending in a direction orthogonal to an axial direction of the projection. - View Dependent Claims (2, 3, 4)
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5. A ceramic sensor module comprising:
- a diaphragm having a displacement portion to be displaced depending on a pressure of a target fluid to be introduced; and
a cylindrical portion integrated with the diaphragm, whereinan electronic component is disposed on a planar surface of the diaphragm opposite to a surface of the diaphragm where the target fluid comes into contact, and the electronic component comprises;
a component body disposed away from a surface corresponding to the displacement portion of the planar surface; and
a lead frame having a base end connected to the component body and a tip end bonded to a part other than the surface corresponding to the displacement portion on the planar surface of the diaphragm. - View Dependent Claims (6, 7, 8)
- a diaphragm having a displacement portion to be displaced depending on a pressure of a target fluid to be introduced; and
Specification