PHYSICAL QUANTITY MEASURING SENSOR AND SENSOR MODULE

• US 20150160085A1
• Filed: 12/04/2014
• Published: 06/11/2015
• Est. Priority Date: 12/06/2013
• Status: Active Grant

• Current Assignee: Nagano Keiki Company Limited
• Original Assignee: Nagano Keiki Company Limited
• Inventors: Kobayashi, Hironori, Tohyama, Shuji, Abe, Yusuke, Sekiya, Haruhiko
• Granted Patent: US 9,772,242 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: G01L 19/0038 being part of the housing other details about the housing G01L19/14
• CPC Class Codes: G01L 19/142 Multiple part housings
• CPC Class Codes: G01L 19/147 Details about the mounting of the sensor to support or covering means
• CPC Class Codes: G01L 9/0041 Transmitting or indicating the displacement of flexible diaphragms

Abstract

A physical quantity measuring sensor includes: a joint having a projection; a ceramic sensor module including a diaphragm and a cylindrical portion integrated with the diaphragm and provided to the projection; and an O-ring interposed between a sensor-module flat portion extending in a direction orthogonal to an axial direction of the cylindrical portion and a joint flat portion extending in a direction orthogonal to an axial direction of the projection.

Claims

1. A physical quantity measuring sensor comprising:

a joint having a cylindrical projection in which an introduction hole for introducing a target fluid is formed;

a ceramic sensor module disposed on a downstream side of the projection in a flow direction of the target fluid, the ceramic sensor module comprising;

a diaphragm to be displaced depending on a pressure of the introduced target fluid; and

a cylindrical portion integrated with the diaphragm and provided to the projection; and

an O-ring interposed between the cylindrical portion and the projection, wherein

the O-ring is interposed between a sensor-module flat portion extending in a direction orthogonal to an axial direction of the cylindrical portion and a joint flat portion extending in a direction orthogonal to an axial direction of the projection.

2. The physical quantity measuring sensor according to claim 1, wherein

an inclined surface for preventing the projection from interfering with an inner circumferential edge of the sensor-module flat portion is formed at an end of the projection.

3. The physical quantity measuring sensor according to claim 1, wherein

the sensor-module flat portion is in parallel to a top flat surface of the diaphragm.

4. The physical quantity measuring sensor according to claim 1, wherein

the joint comprises a retaining member for preventing the sensor module from slipping off from the projection.

5. A ceramic sensor module comprising:

a diaphragm having a displacement portion to be displaced depending on a pressure of a target fluid to be introduced; and

a cylindrical portion integrated with the diaphragm, wherein

an electronic component is disposed on a planar surface of the diaphragm opposite to a surface of the diaphragm where the target fluid comes into contact, and

the electronic component comprises;

a component body disposed away from a surface corresponding to the displacement portion of the planar surface; and

a lead frame having a base end connected to the component body and a tip end bonded to a part other than the surface corresponding to the displacement portion on the planar surface of the diaphragm.

6. The sensor module according to claim 5, wherein

the electronic component is an ASIC.

7. A physical quantity measuring sensor comprising:

a joint having a cylindrical projection in which an introduction hole for introducing a target fluid is formed;

the sensor module according to claim 5 disposed on a downstream side of the projection of the joint in a flow direction of the target fluid; and

a flexible circuit board having a first end electrically connected to the sensor module and a second end electrically connected to a terminal, wherein

the flexible circuit board has an end connected to a part other than the surface corresponding to the displacement portion on the planar surface of the diaphragm.

8. The physical quantity measuring sensor according to claim 7, wherein

the terminal is provided to a connector connected to the joint,

a lid is provided to the connector, and

the flexible circuit board is inserted in the lid.