METHOD, STORAGE MEDIUM AND SYSTEM FOR CONTROLLING THE PROCESSING OF LOTS OF WORKPIECES
First Claim
1. A method, comprising:
- processing each of a plurality of lots with a respective one of at least one first equipment;
moving at least some of said plurality of lots from said respective one of said at least one first equipment to a first storage;
for each of a plurality of second equipments, determining an expected dispatch time of one or more next lots for processing by said second equipments;
assigning each of the lots in said first storage to one of said plurality of second equipments on the basis of at least the determined expected dispatch time;
moving each of the lots in said first storage to one of a plurality of second storages that is associated with the one of said plurality of second equipments to which the respective lot was assigned; and
for each of said plurality of second equipments, moving each of the lots in said second storage associated with the second equipment to the second equipment and processing the lots from said second storage associated with the second equipment with the second equipment.
5 Assignments
0 Petitions
Accused Products
Abstract
A method includes processing each of a plurality of lots with at least one first equipment and moving some of the plurality of lots to a first storage. For each of a plurality of second equipments, an expected dispatch time of one or more next lots for processing by the second equipment is determined Each of the lots in the first storage is assigned to one of the plurality of second equipments on the basis of at least the determined expected dispatch times and moved to one of a plurality of second storages that is associated with one of the plurality of second equipments to which the respective lot was assigned. For each of the plurality of second equipments, each of the lots in the second storage associated with the second equipment is moved to the second equipment and are processed with the second equipment.
16 Citations
35 Claims
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1. A method, comprising:
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processing each of a plurality of lots with a respective one of at least one first equipment; moving at least some of said plurality of lots from said respective one of said at least one first equipment to a first storage; for each of a plurality of second equipments, determining an expected dispatch time of one or more next lots for processing by said second equipments; assigning each of the lots in said first storage to one of said plurality of second equipments on the basis of at least the determined expected dispatch time; moving each of the lots in said first storage to one of a plurality of second storages that is associated with the one of said plurality of second equipments to which the respective lot was assigned; and for each of said plurality of second equipments, moving each of the lots in said second storage associated with the second equipment to the second equipment and processing the lots from said second storage associated with the second equipment with the second equipment. - View Dependent Claims (15, 16, 17)
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- 2. The method of claim 2, wherein each of said plurality of lots comprises a plurality of semiconductor wafers, wherein each of said at least one first equipment performs one or more first steps of a semiconductor manufacturing process for each wafer of each of said plurality of lots that is processed with the respective first equipment, and wherein each of said plurality of second equipments performs one or more second steps of the semiconductor manufacturing process for each wafer of each of said plurality of lots that is processed with the respective second equipment.
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18. A method, comprising:
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providing a first model, said first model relating at least data from a tool to an expected dispatch time of one or more next lots for processing by the tool; receiving at least said data from said tool; using said first model and said received data to determine the expected dispatch time; assigning one or more first lots of workpieces to said tool on the basis of said determined expected dispatch time, moving said one or more first lots of workpieces to said tool and processing said one or more first lots of workpieces by means of said tool; determining a measure of accuracy of said determined expected dispatch time; and updating said first model on the basis of said determined measure of accuracy. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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33. A system, comprising:
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a data processing arrangement, at least one first equipment, a plurality of second equipments, an automated material handling system, a first storage and a plurality of second storages, each of said plurality of second equipments being associated with a respective one of said plurality of second storages; wherein said automated material handling system moves at least some of a plurality of lots from a respective one of said at least one first equipment to said first storage; wherein the data processing arrangement determines, for each of said plurality of second equipments, an expected dispatch time of one or more next lots for processing by said second equipments, assigns each of said lots in said first storage to one of said plurality of second equipments on the basis of at least said expected dispatch times and sends one or more first signals and one or more second signals to said automated material handling system; wherein said automated material handling system, in response to said one or more first signals from said data processing arrangement, moves each of said lots in said first storage to said one of said plurality of second storages that is associated with said one of said plurality of second equipments to which the respective lot was assigned; wherein said automated material handling system, in response to said one or more second signals from said data processing arrangement, moves each of said lots in each of said plurality of second storages to said one of said plurality of second equipments associated with the respective second storage; and wherein each of said plurality of second equipments processes the lots received from said automated material handling system.
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34. A system, comprising:
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means for processing each of a plurality of lots with a respective one of at least one first equipment; means for moving at least some of said plurality of lots from the respective one of said at least one first equipment to a first storage; means for determining, for each of a plurality of second equipments, an expected dispatch time of one or more next lots for processing by said second equipments; means for assigning each of said lots in said first storage to one of said plurality of second equipments on the basis of at least the determined expected dispatch times; means for moving each of said lots in said first storage to one of a plurality of second storages that is associated with the one of said plurality of second equipments to which the respective lot was assigned; and means for moving, for each of said plurality of second equipments, each of said lots in said second storage associated with said second equipments to said second equipments and processing said lots from said second storage associated with said second equipments with said second equipment.
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35. A computer-readable storage medium comprising code for causing a data processing arrangement to:
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provide a model, said model relating at least data from a tool to an expected dispatch time of one or more next lots for processing by said tool; receive at least said data from said tool through a network connection; use said model and said received data to determine the expected dispatch time; assign one or more lots of workpieces to said tool on the basis of said determined expected dispatch time; send a first signal to an automated material handling system through said network connection, said first signal causing said automated material handling system to move said one or more lots of workpieces to said tool; send a second signal to said tool through said network connection, said second signal causing said tool to process said one or more lots of workpieces; determine a measure of accuracy of said determined expected dispatch time; and update said model on the basis of said determined measure of accuracy.
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Specification