MODAL DECOUPLING VIA FLEXURE-BASED TRANSMISSIONS AS APPLIED TO A MICROMACHINED TUNING FORK GYROSCOPE
First Claim
1. A gyroscope comprising:
- a first mass and a second mass;
a drive structure configured to drive each of the first mass and the second mass in a drive mode, the drive structure including a first portion and a second portion, the first portion being configured to drive the first mass in a direction along a drive axis and the second portion being configured to drive the second mass in a direction opposite to the first mass along the drive axis;
a sense structure configured to sense motion of each of the first mass and the second mass in a sense mode along a direction substantially perpendicular to the drive axis; and
a plurality of flexures configured to couple the first portion to the second portion and further configured to decouple the drive mode and the sense mode.
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Accused Products
Abstract
A gyroscope includes a first mass, a second mass, and a drive structure configured to drive each of the first mass and the second mass in a drive mode. The drive structure includes a first portion and a second portion, with the first portion being configured to drive the first mass in a direction along a drive axis and the second portion being configured to drive the second mass in a direction opposite to the first mass along the drive axis. The gyroscope further includes a sense structure configured to sense motion of each of the first mass and the second mass in a sense mode along a direction substantially perpendicular to the drive axis, and a plurality of flexures configured to couple the first portion to the second portion and further configured to decouple the drive mode and the sense mode.
10 Citations
20 Claims
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1. A gyroscope comprising:
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a first mass and a second mass; a drive structure configured to drive each of the first mass and the second mass in a drive mode, the drive structure including a first portion and a second portion, the first portion being configured to drive the first mass in a direction along a drive axis and the second portion being configured to drive the second mass in a direction opposite to the first mass along the drive axis; a sense structure configured to sense motion of each of the first mass and the second mass in a sense mode along a direction substantially perpendicular to the drive axis; and a plurality of flexures configured to couple the first portion to the second portion and further configured to decouple the drive mode and the sense mode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification