Sensor Module and Method of Manufacturing the Same
2 Assignments
0 Petitions
Accused Products
Abstract
The opto-electronic module (1) comprises a first substrate member (P); a third substrate member (B); a second substrate member (O) arranged between said first and third substrate members and comprising one or more transparent portions (ta, tb) through which light can pass, said at least one transparent portion comprising at least a first optical structure (5a;5a′;5b;5b′); a first spacer member (S1) comprised in said first substrate member (P) or comprised in said second substrate member (O) or distinct from and located between these, which comprises at least one opening (4a;4b); a second spacer member (S2) comprised in said second substrate member (O) or comprised in said third substrate member (B) or distinct from and located between these, which comprises at least one opening (3); a light detecting element (D) arranged on and electrically connected to said first substrate member (P); a light emission element (E) arranged on and electrically connected to said first substrate member (P); and a sensing element (8) comprised in or arranged at said third substrate member (B). Such modules (1) are particularly suitable as sensor modules for sensing a magnitude such as a pressure.
4 Citations
64 Claims
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1-37. -37. (canceled)
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38. A sensor module for sensing a magnitude, the module being an opto-electronic module comprising
a first substrate member; -
a third substrate member; a second substrate member arranged between said first and third substrate members and comprising one or more transparent portions through which light can pass, said at least one transparent portion comprising at least a first optical structure; a first spacer member comprised in said first substrate member or comprised in said second substrate member or distinct from and located between these, which comprises at least one opening; a second spacer member comprised in said second substrate member or comprised in said third substrate member or distinct from and located between these, which comprises at least one opening; a light detecting element arranged on and electrically connected to said first substrate member; a light emission element arranged on and electrically connected to said first substrate member; and a sensing element comprised in or arranged at said third substrate member, wherein said sensing element is sensitive to changes in said magnitude. - View Dependent Claims (39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61)
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62. A sensor module for sensing a magnitude, the sensor module comprising a sensing element which is sensitive to changes in said magnitude and an optical read-out arrangement for detecting changes of said sensing element, wherein said optical read-out arrangement comprises
a first substrate member; -
a light detecting element and a light emission element, both arranged on and electrically connected to said first substrate member; a second substrate member arranged between said first substrate member and said sensing element, comprising one or more transparent portions through which light can pass, said at least one transparent portion comprising at least a first optical structure; and a first spacer member comprised in said first substrate member or comprised in said second substrate member or distinct from and located between these, which comprises at least one opening. - View Dependent Claims (63, 64)
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Specification