VERTICAL CAVITY SURFACE EMITTING LASER AND ATOMIC OSCILLATOR

• US 20150180206A1
• Filed: 12/19/2014
• Published: 06/25/2015
• Est. Priority Date: 12/20/2013
• Status: Abandoned Application

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: IMAI, Yasutaka
• Application Number:
  US14/576,823
• Publication Number:
  US 20150180206A1
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: G04F 5/145 using Coherent Population Trapping
• CPC Class Codes: H01S 2301/176 Specific passivation layers on surfaces other than the emission facet
• CPC Class Codes: H01S 5/0421 characterised by the semiconducting contacting layers electrodes H01S5/0425
• CPC Class Codes: H01S 5/04254 characterised by the shape
• CPC Class Codes: H01S 5/04257 having positive and negative electrodes on the same side of the substrate
• CPC Class Codes: H01S 5/06226 Modulation at ultra-high frequencies
• CPC Class Codes: H01S 5/18313 by oxidizing at least one of the DBR layers
• CPC Class Codes: H01S 5/18333 only above the active layer
• CPC Class Codes: H01S 5/1835 Non-circular mesa
• CPC Class Codes: H01S 5/18352 Mesa with inclined sidewall
• CPC Class Codes: H03L 7/26 using energy levels of molecules, atoms, or subatomic particles as a frequency reference

Abstract

A vertical cavity surface emitting laser includes: a substrate; and a laminated body which is provided over the substrate, wherein, in a plan view, the laminated body includes a first distortion imparting portion, a second distortion imparting portion, and a resonance portion which is provided between the first distortion imparting portion and the second distortion imparting portion and resonates light generated in the laminated body, and the laminated body includes a first mirror layer which is provided over the substrate, an active layer which is provided over the first mirror layer, a second mirror layer which is provided over the active layer, and a contact layer which is provided over the second mirror layer of the resonance portion, except for a portion over the second mirror layer of the first distortion imparting portion and for a portion over the second mirror layer of the second distortion imparting portion.

Claims

1. A vertical cavity surface emitting laser comprising:

a substrate; and

a laminated body which is provided over the substrate,

wherein, in a plan view, the laminated body includes a first distortion imparting portion, a second distortion imparting portion, and a resonance portion which is provided between the first distortion imparting portion and the second distortion imparting portion and resonates light generated in the laminated body, and

the laminated body includes

a first mirror layer which is provided over the substrate,

an active layer which is provided over the first mirror layer,

a second mirror layer which is provided over the active layer, and

a contact layer which is provided over the second mirror layer of the resonance portion, except for a portion over the second mirror layer of the first distortion imparting portion and for a portion over the second mirror layer of the second distortion imparting portion.

2. The vertical cavity surface emitting laser according to claim 1, further comprising:

an electrode which forms ohmic contact with the contact layer.

3. The vertical cavity surface emitting laser according to claim 1,

wherein the laminated body includes a current constriction layer which is provided between the first mirror layer and the second mirror layer.

4. An atomic oscillator comprising:

the vertical cavity surface emitting laser according to claim 1.

5. An atomic oscillator comprising:

the vertical cavity surface emitting laser according to claim 2.

6. An atomic oscillator comprising:

the vertical cavity surface emitting laser according to claim 3.