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VERTICAL CAVITY SURFACE EMITTING LASER AND ATOMIC OSCILLATOR

  • US 20150180213A1
  • Filed: 12/18/2014
  • Published: 06/25/2015
  • Est. Priority Date: 12/20/2013
  • Status: Active Grant
First Claim
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1. A vertical cavity surface emitting laser comprising:

  • a substrate;

    a laminated body which is provided over the substrate;

    an insulation layer which is provided over at least a portion of the laminated body;

    an electrode of which at least a portion is provided over the laminated body;

    a wire-bonded pad; and

    a wiring which electrically connects the electrode and the pad,wherein the laminated body includes a first mirror layer provided over the substrate, an active layer provided over the first mirror layer, and a second mirror layer provided over the active layer,in a plan view, the laminated body includes a first distortion imparting portion, a second distortion imparting portion, and a resonance portion which is provided between the first distortion imparting portion and the second distortion imparting portion and resonates light generated in the active layer, andin the plan view, the insulation layer is provided so as to cover at least a portion of the first distortion imparting portion,in the plan view, the electrode is provided so as to cover at least a portion of the resonance portion,in the plan view, the wiring is provided so as to cover at least the entirety of a portion of the first distortion imparting portion in a width direction, andin the plan view, a width of the wiring is greater than a width of the first distortion imparting portion and is smaller than a width of the electrode.

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