Membrane-Based Nano-Electromechanical Systems Device And Methods To Make And Use Same

• US 20150180372A1
• Filed: 06/19/2013
• Published: 06/25/2015
• Est. Priority Date: 06/19/2012
• Status: Active Grant

• Current Assignee: Brane Audio, LLC
• Original Assignee: Clean Energy Labs LLC
• Inventors: Pinkerton, Joseph F, Everett, William Neil, Lackowski, William Martin, Badger, David A
• Granted Patent: US 9,515,580 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: B81B 2203/0127 Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
• CPC Class Codes: B81B 3/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes B81B5/00 takes precedence
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: G02B 7/1821 for rotating or oscillating mirrors
• CPC Class Codes: H01G 5/16 using variation of distance between electrodes
• CPC Class Codes: H01H 59/00 Electrostatic relays; Electro-adhesion relays
• CPC Class Codes: H02N 1/08 with conductive charge carrier, i.e. capacitor machines
• CPC Class Codes: Y10S 977/774 Exhibiting three-dimensional carrier confinement, e.g. quantum dots

Abstract

Nano-electromechanical systems (NEMS) devices that utilize thin electrically conductive membranes, which can be, for example, graphene membranes. The membrane-based NEMS devices can be used as sensors, electrical relays, adjustable angle mirror devices, variable impedance devices, and devices performing other functions.

Claims

1. A sensor comprising:

(a) a substrate having a cavity;

(b) a thin electrically conductive membrane bounding at least part of the cavity;

(c) a first source trace electrically connected to the thin electrically conductive membrane;

(d) a first sensor trace operatively connected to the substrate; and

(e) a first gate trace operatively connected to the substrate.

2. The sensor of claim 1, wherein the thin electrically conductive membrane covers the cavity.

3. The sensor of claim 1, wherein the thin electrically conductive membrane comprises one layer of graphene.

4. The sensor of claim 1, wherein the thin electrically conductive membrane comprises multiple layers of graphene.

5. The sensor of claim 1, wherein the first gate trace is located within the cavity.

6. The sensor of claim 1, wherein the first sensor trace is located between the first gate trace and the thin electrically conductive membrane.

7. The sensor of claim 1 further comprising a second source trace electrically connected to the thin electrically conductive membrane.

8. The sensor of claim 1 further comprising a second sensor trace located within the cavity.

9. The sensor of claim 1 further comprising a second gate trace located within the cavity.

10. The sensor of claim 1 further comprising a proof mass mechanically connected to the thin electrically conductive membrane.

11. The sensor of claim 10, wherein the proof mass comprises metal.

12. The sensor of claim 10, wherein the proof mass comprises copper.

13. The sensor of claim 10, wherein the proof mass was a mass made by the process wherein the proof mass was chemically etched from the same metallic foil used to grow the thin electrically conductive membrane.

14. The sensor of claim 1 further comprising an array of particles mechanically connected to the thin electrically conductive membrane.

15. The sensor of claim 14, wherein the particles comprise quantum dots.

16. A sensor comprising:

(a) a substrate having a cavity;

(b) a thin electrically conductive membrane bounding at least part of the cavity;

(c) a first source trace electrically connected to the thin electrically conductive membrane;

(d) a first sensor trace located within the cavity; and

(e) a proof mass mechanically connected to the thin electrically conductive membrane.

17. The sensor of claim 16, further comprising a first gate trace located within the cavity.

18. The sensor of claim 16, wherein the thin electrically conductive membrane comprises one layer of graphene.

19. The sensor of claim 16, wherein the thin electrically conductive membrane comprises multiple layers of graphene.

20. The sensor of claim 16, wherein the thin electrically conductive membrane covers the cavity.

21. The sensor of claim 16, wherein the proof mass comprises metal.

22. The sensor of claim 16, wherein the proof mass comprises copper.

23. A sensor comprising:

(a) a substrate having a cavity;

(b) a thin electrically conductive membrane bounding at least part of the cavity;

(c) a first source trace electrically connected to the thin electrically conductive membrane;

(d) a second source trace electrically connected to the thin electrically conductive membrane; and

(e) a first sensor trace located within the cavity.

24. The sensor of claim 23 further comprising a first gate trace located within the cavity.

25. The sensor of claim 23 further comprising a third source trace electrically connected to the thin electrically conductive membrane.

26. The sensor of claim 23 further comprising a second sensor trace located within the cavity.

27. The sensor of claim 23, wherein the thin electrically conductive membrane comprises one layer of graphene.

28. The sensor of claim 23, wherein the thin electrically conductive membrane comprises multiple layers of graphene.

29. The sensor of claim 23, wherein the thin electrically conductive membrane covers the cavity.

30-65. -65. (canceled)