FUNCTIONAL DEVICE, ACCELERATION SENSOR, AND SWITCH
First Claim
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1. A functional device comprising:
- a substrate; and
a movable section configured to be held by the substrate and to be movable along a first direction in a surface of the substrate,wherein the movable section includes a plurality of first shaft portions with relatively high rigidity,the plurality of first shaft portions are arranged side by side to extend along the first direction and to be line-symmetric to one another, andprotrusions configured to brake the movable section are provided on substantially extended lines of the first shaft portions.
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Abstract
A functional device includes: a substrate; and a movable section configured to be held by the substrate and to be movable along a first direction in a surface of the substrate, in which the movable section includes a plurality of first shaft portions with relatively high rigidity, the plurality of first shaft portions are arranged side by side to extend along the first direction and to be line-symmetric to one another, and protrusions configured to brake the movable section are provided on substantially extended lines of the first shaft portions.
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Citations
17 Claims
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1. A functional device comprising:
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a substrate; and a movable section configured to be held by the substrate and to be movable along a first direction in a surface of the substrate, wherein the movable section includes a plurality of first shaft portions with relatively high rigidity, the plurality of first shaft portions are arranged side by side to extend along the first direction and to be line-symmetric to one another, and protrusions configured to brake the movable section are provided on substantially extended lines of the first shaft portions. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An acceleration sensor provided with a functional device, the functional device comprising:
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a substrate; and a movable section configured to be held by the substrate and to be movable along a first direction in a surface of the substrate, wherein the movable section includes a plurality of first shaft portions with relatively high rigidity, the plurality of first shaft portions are arranged side by side to extend along the first direction and to be line-symmetric to one another, and protrusions configured to brake the movable section are provided on substantially extended lines of the first shaft portions. - View Dependent Claims (13, 14)
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15. A switch provided with a functional device, the functional device comprising:
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a substrate; and a movable section configured to be held by the substrate and to be movable along a first direction in a surface of the substrate, wherein the movable section includes a plurality of first shaft portions with relatively high rigidity, the plurality of first shaft portions are arranged side by side to extend along the first direction and to be line-symmetric to one another, and protrusions configured to brake the movable section are provided on substantially extended lines of the first shaft portions. - View Dependent Claims (16, 17)
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Specification