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FUNCTIONAL DEVICE, ACCELERATION SENSOR, AND SWITCH

  • US 20150183636A1
  • Filed: 11/26/2014
  • Published: 07/02/2015
  • Est. Priority Date: 12/26/2013
  • Status: Active Grant
First Claim
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1. A functional device comprising:

  • a substrate; and

    a movable section configured to be held by the substrate and to be movable along a first direction in a surface of the substrate,wherein the movable section includes a plurality of first shaft portions with relatively high rigidity,the plurality of first shaft portions are arranged side by side to extend along the first direction and to be line-symmetric to one another, andprotrusions configured to brake the movable section are provided on substantially extended lines of the first shaft portions.

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