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METHOD AND APPARATUS FOR DESIGN OF A METROLOGY TARGET

  • US 20150185625A1
  • Filed: 12/19/2014
  • Published: 07/02/2015
  • Est. Priority Date: 12/30/2013
  • Status: Active Grant
First Claim
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1. A method of metrology target design, the method comprising:

  • determining a sensitivity of a parameter of a metrology target design to a perturbation of a process parameter for forming, or measuring the formation of, the metrology target; and

    determining a robustness of the metrology target design based on the sensitivity multiplied by the perturbation of the process parameter.

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