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FIN CONTACTED ELECTROSTATIC DISCHARGE (ESD) DEVICES WITH IMPROVED HEAT DISTRIBUTION

  • US 20150187753A1
  • Filed: 01/02/2014
  • Published: 07/02/2015
  • Est. Priority Date: 01/02/2014
  • Status: Active Grant
First Claim
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1. A method comprising:

  • forming a plurality of fins on a substrate which is aligned with at least one well region in the substrate; and

    forming at least one electrostatic discharge (ESD) device spanning two or more of the plurality of fins, wherein the forming of the ESD device comprises;

    forming an epitaxial material spanning the two or more of the plurality of fins; and

    forming one or more contacts on the epitaxial material.

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