PIEZOELECTRIC MATERIAL AND PIEZOELECTRIC ELEMENT USING THE SAME, AND ELECTRONIC APPARATUS USING THE PIEZOELECTRONIC ELEMENT

• US 20150194594A1
• Filed: 08/21/2013
• Published: 07/09/2015
• Est. Priority Date: 08/27/2012
• Status: Active Grant

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.), University of Yamanashi
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Murakami, Shunsuke, Watanabe, Takayuki, Ueda, Miki, Kumada, Nobuhiro
• Granted Patent: US 9,660,174 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: B06B 1/06 operating with piezoelectric effect or with electrostriction piezoelectric or electrostrictive devices per se H10N30/00
• CPC Class Codes: B41J 2/14201 Structure of print heads with piezoelectric elements
• CPC Class Codes: B41J 2/14233 of film type, deformed by bending and disposed on a diaphragm
• CPC Class Codes: B41J 2202/03 Specific materials used
• CPC Class Codes: C04B 2235/3201 Alkali metal oxides or oxide-forming salts thereof
• CPC Class Codes: C04B 2235/3215 Barium oxides or oxide-forming salts thereof
• CPC Class Codes: C04B 2235/3232 Titanium oxides or titanates, e.g. rutile or anatase
• CPC Class Codes: C04B 2235/3234 Titanates, not containing zirconia
• CPC Class Codes: C04B 2235/3236 Alkaline earth titanates
• CPC Class Codes: C04B 2235/3251 Niobium oxides, niobates, tantalum oxides, tantalates, or oxide-forming salts thereof
• CPC Class Codes: C04B 2235/3255 Niobates or tantalates, e.g. silver niobate
• CPC Class Codes: C04B 2235/3281 Copper oxides, cuprates or oxide-forming salts thereof, e.g. CuO or Cu2O
• CPC Class Codes: C04B 2235/3298 Bismuth oxides, bismuthates or oxide forming salts thereof, e.g. zinc bismuthate
• CPC Class Codes: C04B 2235/72 Products characterised by the absence or the low content of specific components, e.g. alkali metal free alumina ceramics
• CPC Class Codes: C04B 2235/77 Density
• CPC Class Codes: C04B 2235/785 Submicron sized grains, i.e. from 0,1 to 1 micron
• CPC Class Codes: C04B 2235/786 Micrometer sized grains, i.e. from 1 to 100 micron
• CPC Class Codes: C04B 2235/96 Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
• CPC Class Codes: C04B 35/495 based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
• CPC Class Codes: C04B 35/6261 Milling
• CPC Class Codes: C04B 35/62695 : Granulation or pelletising devices for shaping artificial aggregates from ceramic mixtures B28B1/004
• CPC Class Codes: G02B 27/0006 : with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation G02B1/18 takes precedence; cleaning in general B08B
• CPC Class Codes: H02N 2/001 : Driving devices, e.g. vibrators
• CPC Class Codes: H02N 2/106 : Langevin motors
• CPC Class Codes: H02N 2/163 : Motors with ring stator
• CPC Class Codes: H10N 30/053 : by integrally sintering piezoelectric or electrostrictive bodies and electrodes
• CPC Class Codes: H10N 30/097 : by sintering
• CPC Class Codes: H10N 30/50 : having a stacked or multilayer structure
• CPC Class Codes: H10N 30/852 : Composite materials, e.g. having 1-3 or 2-2 type connectivity
• CPC Class Codes: H10N 30/8542 : Alkali metal based oxides, e.g. lithium, sodium or potassium niobates
• CPC Class Codes: H10N 30/8561 : Bismuth based oxides
• CPC Class Codes: H10N 30/877 : Conductive materials in general H01B1/00

Abstract

Provided is a lead-free piezoelectric material having a high Curie temperature, a satisfactory mechanical quality factor, and a satisfactory Young'"'"'s modulus, and a piezoelectric element and a multilayered piezoelectric element each using the piezoelectric material. The piezoelectric material contains 0.04 mol % or more to 2.00 mol % or less of Cu with respect to 1 mol of a perovskite-type metal oxide represented by the following general formula: (K_vBi_wBa_1-v-w)_1-yNa_x(Nb_yTi_1-y)O₃ where relationships of 0<v≦0.39, 0<w≦0.39, 0.9≦w/v≦1.1, 0.80≦x≦0.95, and 0.85≦y≦0.95 are satisfied.

Claims

1. A piezoelectric material comprising 0.04 mol % or more to 2.00 mol % or less of Cu with respect to 1 mol of a perovskite-type metal oxide represented by general formula (1):

(K_vBi_wBa_1-v-w)_1-yNa_x(Nb_yTi_1-y)O₃ 

 

(1),

where relationships of 0<

v≦

0.39, 0<

w≦

0.39, 0.9<

w/v≦

1.1, 0.80≦

x≦

0.95, and 0.85≦

y≦

0.95 are satisfied.

2. The piezoelectric material according to claim 1, wherein the piezoelectric material satisfies relationships of 0<

v≦

0.05 and 0<

w≦

0.05 in the general formula (1).

3. The piezoelectric material according to claim 1, wherein the piezoelectric material satisfies a relationship of x<

y in the general formula (1).

4. A piezoelectric element comprising:

a first electrode;

a piezoelectric material; and

a second electrode,

wherein the piezoelectric material comprises the piezoelectric material according to claim 1.

5. A multilayered piezoelectric element comprising a piezoelectric material layer and an electrode layer comprising an internal electrode, which are alternately stacked,

wherein the piezoelectric material layer comprises the piezoelectric material according to claim 1.

6. The multilayered piezoelectric element according to claim 5, wherein the internal electrode comprises Ag and Pd, and a weight ratio M1/M2 of a content weight M1 of the Ag to a content weight M2 of the Pd satisfies a relationship of 1.5≦

M1/M2≦

9.0.

7. The multilayered piezoelectric element according to claim 5, wherein the internal electrode contains at least one kind of Ni and Cu.

8. A manufacturing method for the multilayered piezoelectric element as defined in claim 5, comprising:

a step (A) of obtaining a slurry by dispersing a metal compound containing at least one kind of K, Bi, Ba, Na, Nb, Ti, and Cu;

a step (B) of obtaining a compact from the slurry;

a step (C) of forming an electrode on the compact; and

a step (D) of obtaining a multilayered piezoelectric element by sintering a compact in which the compact containing the metal compound and the electrode are stacked alternately,

the step (D) being performed at a sintering temperature of 1,150°

C. or less.

9. A liquid discharge head comprising:

a liquid chamber comprising a vibration portion including the piezoelectric element according to claim 4; and

an ejection port communicating to the liquid chamber.

10. A liquid discharge device comprising:

a conveyance portion for a recording medium; and

the liquid discharge head according to claim 9.

11. An ultrasonic motor comprising:

a vibration body including the piezoelectric element according to claim 4; and

a moving body to be brought into contact with the vibration body.

12. An optical device comprising a drive portion including the ultrasonic motor according to claim 11.

13. A vibration device comprising a vibration body including a diaphragm including the piezoelectric element according to claim 4.

14. A dust removing device comprising a vibration portion including the vibration device according to claim 13.

15. An imaging device comprising:

the dust removing device according to claim 14; and

an image pickup element unit,

wherein the diaphragm of the dust removing device is disposed on a light receiving plane side of the image pickup element unit.

16. An electronic apparatus, comprising a piezoelectric acoustic component including the piezoelectric element according to claim 4.

17. A liquid discharge head comprising:

a liquid chamber comprising a vibration portion including the multilayered piezoelectric element according to claim 5; and

an ejection port communicating to the liquid chamber.

18. A liquid discharge device comprising:

a conveyance portion for a recording medium; and

the liquid discharge head according to claim 17.

19. An ultrasonic motor comprising:

a vibration body including the multilayered piezoelectric element according to claim 5; and

a moving body to be brought into contact with the vibration body.

20. An optical device comprising a drive portion including the ultrasonic motor according to claim 19.

21. A vibration device comprising a vibration body including a diaphragm including the multilayered piezoelectric element according to claim 5.

22. A dust removing device comprising a vibration portion including the vibration device according to claim 21.

23. An imaging device comprising:

the dust removing device according to claim 22; and

an image pickup element unit,

wherein the diaphragm of the dust removing device is disposed on a light receiving plane side of the image pickup element unit.

24. An electronic apparatus, comprising a piezoelectric acoustic component including the multilayered piezoelectric element according to claim 5.