Interposer For MEMS-On-Lid MIcirophone
First Claim
1. A microphone, the microphone comprising:
- an interposer, the interposer including at least one wall portion that forms a cavity, the wall portion including a first side and a second side, the first side and the second side being opposite from the other;
a lid coupled to the first side of the interposer;
a base coupled to the second side of the interposer such that the lid and the base enclose the cavity;
a microelectromechanical system (MEMS) device disposed in the cavity;
such that the interposer structurally supports one or both of the lid and the base, the interposer including a plurality of plated regions that are configured to electrically connect the lid and the base, the plated regions being configured to at least partially be exposed and open to the cavity.
1 Assignment
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Accused Products
Abstract
A microphone includes an interposer, a lid, and a base. The interposer includes at least one wall portion that forms a cavity. The wall portion includes a first side and a second side that are opposite from each other. The lid is coupled to the first side of the interposer and the base is coupled to the second side of the interposer such that the lid and the base enclose the cavity. A microelectromechanical system (MEMS) device is disposed in the cavity. The interposer structurally supports one or both of the lid and the base. The interposer includes a plurality of plated regions that are configured to electrically connect the lid and the base. The plated regions are configured to at least partially be exposed and open to the cavity.
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Citations
10 Claims
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1. A microphone, the microphone comprising:
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an interposer, the interposer including at least one wall portion that forms a cavity, the wall portion including a first side and a second side, the first side and the second side being opposite from the other; a lid coupled to the first side of the interposer; a base coupled to the second side of the interposer such that the lid and the base enclose the cavity; a microelectromechanical system (MEMS) device disposed in the cavity; such that the interposer structurally supports one or both of the lid and the base, the interposer including a plurality of plated regions that are configured to electrically connect the lid and the base, the plated regions being configured to at least partially be exposed and open to the cavity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification