×

METHOD OF FORMING INDIVIDUAL METALLIC MICROSTRUCTURES

  • US 20150203969A1
  • Filed: 03/13/2013
  • Published: 07/23/2015
  • Est. Priority Date: 06/29/2012
  • Status: Active Grant
First Claim
Patent Images

1. A method of making a plurality of three-dimensional metallic microstructures, the method comprising:

  • masking a silicon-based substrate with a mask having a plurality of apertures therethrough;

    etching the masked substrate to form a plurality of cavities in the substrate;

    depositing a metallic layer over the mask and in the plurality of cavities in contact with the substrate, forming a metallic structure in each of the cavities;

    removing the metallic layer from over the mask;

    removing the mask from the substrate to provide a plurality of individual metallic microstructures.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×