ANGULAR VELOCITY DETECTION DEVICE AND ANGULAR VELOCITY SENSOR INCLUDING THE SAME
First Claim
1. An angular velocity detection device comprising:
- a first fixed portion,a second fixed portion,a first beam portion connected to the first fixed portion,a second beam portion connected to the second fixed portion,a sensing part connected to the first beam portion and the second beam portion,a detector portion disposed in the sensing portion,a first slit disposed between the sensing part and the first fixed portion,a second slit disposed between the sensing part and the second fixed portion,wherein,the sensing part comprises;
a third beam portion connected to the first beam portion,a fourth beam portion connected to the second beam portion and extending along a same direction which the third beam portion extends along,a fifth beam portion connected to the third beam portion and the fourth beam portion and extending along a direction orthogonal to a direction which the third beam portion extends along,a sixth beam portion connected to the third beam portion and fourth beam portion and extending along a direction orthogonal to the direction which the third beam portion extends along and parallel to the fifth beam portion,a central beam portion connected to the fifth beam portion and the sixth beam portion,a seventh beam portion, an eighth beam portion, a ninth beam portion, and a tenth beam portion each connected to the central beam portion, anda first mass portion, a second mass portion, a third mass portion, and a fourth mass portion connected to a respective one of the seventh beam portion, the eighth beam portion, the ninth beam portion, and the tenth beam portion,wherein the detector portion comprises;
a first angular velocity detector portion that detects an angular velocity around a first axis, anda second angular velocity detector portion that detects an angular velocity around a second axis orthogonal to the first axis.
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Accused Products
Abstract
An angular velocity detection device includes an outer frame including fixed portions, outer beam portions connected to the fixed portions, a sensing part surrounded by the outer frame with first slit therebetween, and a joint connecting the outer frame and the sensing part. The sensing part includes an inner beam portion, a flexible portion, and a detector. The inner beam portion has a hollow region inside and is square-shaped when viewed from above. The flexible portion is formed in the hollow region of the inner beam portion, and is connected to the inner edge of the inner beam portion. The detector is disposed in the flexible portion. The first slit is formed to surround the sensing part excluding the joint.
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Citations
8 Claims
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1. An angular velocity detection device comprising:
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a first fixed portion, a second fixed portion, a first beam portion connected to the first fixed portion, a second beam portion connected to the second fixed portion, a sensing part connected to the first beam portion and the second beam portion, a detector portion disposed in the sensing portion, a first slit disposed between the sensing part and the first fixed portion, a second slit disposed between the sensing part and the second fixed portion, wherein, the sensing part comprises; a third beam portion connected to the first beam portion, a fourth beam portion connected to the second beam portion and extending along a same direction which the third beam portion extends along, a fifth beam portion connected to the third beam portion and the fourth beam portion and extending along a direction orthogonal to a direction which the third beam portion extends along, a sixth beam portion connected to the third beam portion and fourth beam portion and extending along a direction orthogonal to the direction which the third beam portion extends along and parallel to the fifth beam portion, a central beam portion connected to the fifth beam portion and the sixth beam portion, a seventh beam portion, an eighth beam portion, a ninth beam portion, and a tenth beam portion each connected to the central beam portion, and a first mass portion, a second mass portion, a third mass portion, and a fourth mass portion connected to a respective one of the seventh beam portion, the eighth beam portion, the ninth beam portion, and the tenth beam portion, wherein the detector portion comprises; a first angular velocity detector portion that detects an angular velocity around a first axis, and a second angular velocity detector portion that detects an angular velocity around a second axis orthogonal to the first axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification