CHARGED PARTICLE BEAM DEVICE, CONTROL METHOD FOR CHARGED PARTICLE BEAM DEVICE, AND CROSS-SECTION PROCESSING OBSERVATION APPARATUS
First Claim
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1. A charged particle beam device comprising:
- a charged particle beam column comprising;
a charged particle beam generation-focusing portion configured to generate and focus a charged particle beam; and
a deflector configured to perform scanning with the charged particle beam in a two-dimensional direction;
a charged particle beam control unit, which is configured to control the charged particle beam generation-focusing portion and the deflector, and which comprises a digital/analog converter for converting an input digital signal into an analog signal that is to be input to the deflector; and
a field-of-view setting unit configured to set a value of a field of view of the charged particle beam where the scanning by the deflector is performed on the basis of a set value of a slice amount.
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Abstract
A cross-section processing observation apparatus includes an ion beam control unit for controlling a charged particle beam generation-focusing portion and a deflector and including a DAC which converts an input digital signal into an analog signal which is to be input to the deflector, and a field-of-view setting portion for setting a value of a field of view of a charged particle beam where the scanning performed by the deflector is performed on the basis of a set value of a slice amount.
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Citations
6 Claims
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1. A charged particle beam device comprising:
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a charged particle beam column comprising; a charged particle beam generation-focusing portion configured to generate and focus a charged particle beam; and a deflector configured to perform scanning with the charged particle beam in a two-dimensional direction; a charged particle beam control unit, which is configured to control the charged particle beam generation-focusing portion and the deflector, and which comprises a digital/analog converter for converting an input digital signal into an analog signal that is to be input to the deflector; and a field-of-view setting unit configured to set a value of a field of view of the charged particle beam where the scanning by the deflector is performed on the basis of a set value of a slice amount. - View Dependent Claims (2, 3, 4, 5)
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6. A control method for a charged particle beam device,
wherein the charged particle beam device comprises: - a charged particle beam column comprising a charged particle beam generation-focusing portion configured to generate and focus a charged particle beam and a deflector configured to perform scanning with the charged particle beam in a two-dimensional direction;
a charged particle beam control unit that controls the charged particle beam generation-focusing portion and the deflector and includes a digital/analog converter for converting an input digital signal into an analog signal that is to be input to the deflector; and
a field-of-view setting unit,the method comprising using the charged particle beam device and the charged particle beam control unit and controlling the field-of-view setting unit to set a value of a field of view of a charged particle beam where the scanning by the deflector is performed on the basis of a set value of a slice amount.
- a charged particle beam column comprising a charged particle beam generation-focusing portion configured to generate and focus a charged particle beam and a deflector configured to perform scanning with the charged particle beam in a two-dimensional direction;
Specification