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CHARGED PARTICLE BEAM DEVICE, CONTROL METHOD FOR CHARGED PARTICLE BEAM DEVICE, AND CROSS-SECTION PROCESSING OBSERVATION APPARATUS

  • US 20150206702A1
  • Filed: 01/21/2015
  • Published: 07/23/2015
  • Est. Priority Date: 01/23/2014
  • Status: Active Grant
First Claim
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1. A charged particle beam device comprising:

  • a charged particle beam column comprising;

    a charged particle beam generation-focusing portion configured to generate and focus a charged particle beam; and

    a deflector configured to perform scanning with the charged particle beam in a two-dimensional direction;

    a charged particle beam control unit, which is configured to control the charged particle beam generation-focusing portion and the deflector, and which comprises a digital/analog converter for converting an input digital signal into an analog signal that is to be input to the deflector; and

    a field-of-view setting unit configured to set a value of a field of view of the charged particle beam where the scanning by the deflector is performed on the basis of a set value of a slice amount.

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