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CHARGED PARTICLE BEAM APPARATUS AND PROCESSING METHOD

  • US 20150206708A1
  • Filed: 01/21/2015
  • Published: 07/23/2015
  • Est. Priority Date: 01/22/2014
  • Status: Active Grant
First Claim
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1. A charged particle beam apparatus comprising:

  • a charged particle beam column configured to irradiate a charged particle beam; and

    a controller configured to control the charged particle beam column to irradiate the charged particle beam at a first pixel interval for a first region and to irradiate the charged particle beam at a second pixel interval different from the first pixel interval for a second region included in the first region.

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