×

SENSOR STRUCTURES, SYSTEMS AND METHODS WITH IMPROVED INTEGRATION AND OPTIMIZED FOOTPRINT

  • US 20150210533A1
  • Filed: 01/24/2014
  • Published: 07/30/2015
  • Est. Priority Date: 01/24/2014
  • Status: Active Grant
First Claim
Patent Images

1. A sensor device comprising:

  • a substrate;

    a plurality of support elements spaced apart from each other and arranged on the substrate; and

    a moveable element supported on and spaced apart from the substrate by the plurality of support elements, wherein the moveable element, the substrate and the plurality of support elements define a cavity into which the moveable element can deflect in response to a physical quantity to be sensed by the sensor device.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×