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REACTOR FILAMENT ASSEMBLY WITH ENHANCED MISALIGNMENT TOLERANCE

  • US 20150211111A1
  • Filed: 01/29/2014
  • Published: 07/30/2015
  • Est. Priority Date: 01/29/2014
  • Status: Active Grant
First Claim
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1. A CVD reactor for bulk production of polysilicon, comprising:

  • a base plate configured with a first filament support chuck and a second filament support chuck;

    an enclosure attachable to said base plate so as to form a deposition chamber; and

    a filament assembly comprising;

    a first tubular silicon filament, said first tubular silicon filament being vertically oriented and having a bottom end making an electrical connection with said first filament support chuck;

    a second tubular silicon filament, said second tubular silicon filament being vertically oriented and having a bottom end making an electrical connection with said second filament support chuck;

    a horizontal bridge configured for electrically connecting top ends of said first and second tubular silicon filaments; and

    a shaped element having a peripheral surface surrounding a central axis of the shaped element, said peripheral surface being slanted or curved so as to form a slidable region of contact around a perimeter of said top end or said bottom end of said first tubular silicon filament when said peripheral surface is placed adjacent to said top end or said bottom end of the first tubular silicon filament;

    said peripheral surface being configured to maintain at least 50% of said region of contact when an angle between the central axes of the shaped element and a central axis of the first tubular silicon filament is varied up to a maximum tilt angle.

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