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GYROSCOPE STRUCTURE AND GYROSCOPE

  • US 20150211854A1
  • Filed: 01/28/2015
  • Published: 07/30/2015
  • Est. Priority Date: 01/28/2014
  • Status: Active Grant
First Claim
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1. A microelectromechanical gyroscope structure, comprising:

  • a first pair of drive structures comprising a first drive structure and a second drive structure, wherein said first drive structure is coupled to a first seismic mass and the second drive structure is coupled to a second seismic mass;

    a second pair of drive structures comprising a third drive structure and a fourth drive structure, wherein the third drive structure is coupled to a third seismic mass and the fourth drive structure is coupled to a fourth seismic mass,wherein each drive structure includes a transducer configured to induce primary oscillation of the corresponding seismic mass;

    a first pair of sense structures comprising a first sense structure and a second sense structure;

    a second pair of sense structures comprising a third sense structure and a fourth sense structure;

    wherein the seismic masses of at least one pair of the first and second drive structures are coupled to oscillate in opposite phase and aligned to a common axis of primary oscillation, wherein an axis of primary oscillation of the first pair of drive structures and an axis of primary oscillation of the second pair of drive structures extend orthogonally along a plane of oscillation,wherein each sense structure includes a sense device and a coupling spring structure, wherein the coupling spring structure connects the sense device to at least one seismic mass of the first pair of drive structures and to at least one seismic mass of the second pair of drive structures,wherein the coupling structure is configured to relay to the sense device a component of the motion of each of the seismic masses in a direction perpendicular to their axis of primary oscillation, and to absorb a component of the motion of each of the seismic masses in a direction of their axis of primary oscillation, andwherein the sense device is suspended to a static support and configured to oscillate in a direction diagonal to the axis of primary oscillation of the first pair of drive structures and diagonal to the axis of primary oscillation of the second pair of drive structures.

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