RING GYROSCOPE STRUCTURE AND GYROSCOPE
First Claim
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1. A planar microelectromechanical gyroscope structure comprising:
- a circular structure that extends around a center point;
a central spring structure for suspending the circular structure to four central anchor points, symmetrically located around the center point;
four central circle points and four peripheral circle points between the central circle points on the circular structure, neighboring ones of said four peripheral circle points forming a pair of peripheral circle points and neighboring ones of said four central circle points forming a pair of central circle points,wherein the central spring structure is configured to connect each of the four central anchor points to a pair of central circle points on the circular structure,wherein a connection between the central spring structure and the circular structure is configured to transform a radial on-plane displacement of a first circle point of a pair of peripheral or central circle points to a reverse radial on-plane force on a second circle point of the pair of peripheral or central circle points,wherein a direction of the radial on-plane displacement of the first circle point, and the direction of the radial on-plane force on the second circle point, are orthogonal.
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Abstract
A ring gyroscope structure with central spring structure that prefers prefers 2θ-modes and makes them low in frequency. The flexing resonance modes that tend to couple to external mechanical excitation are clearly higher that the 2θ-modes. The described structure is thus very robust against external mechanical shocks and vibrations
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Citations
14 Claims
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1. A planar microelectromechanical gyroscope structure comprising:
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a circular structure that extends around a center point; a central spring structure for suspending the circular structure to four central anchor points, symmetrically located around the center point; four central circle points and four peripheral circle points between the central circle points on the circular structure, neighboring ones of said four peripheral circle points forming a pair of peripheral circle points and neighboring ones of said four central circle points forming a pair of central circle points, wherein the central spring structure is configured to connect each of the four central anchor points to a pair of central circle points on the circular structure, wherein a connection between the central spring structure and the circular structure is configured to transform a radial on-plane displacement of a first circle point of a pair of peripheral or central circle points to a reverse radial on-plane force on a second circle point of the pair of peripheral or central circle points, wherein a direction of the radial on-plane displacement of the first circle point, and the direction of the radial on-plane force on the second circle point, are orthogonal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification