ACTIVE VIBRATION ABSORBER
First Claim
1. An active vibration absorber comprising:
- a mounting portion that is attachable to a structure, the structure incorporating a positioning system which serves to vibrate the structure during its operation;
an inertial mass that is resiliently coupled to the mounting portion; and
a force actuator which is operative to controllably move the inertial mass relative to the mounting portion;
wherein the force actuator is configured to move the inertial mass relative to the mounting body according to a motion profile during a motion cycle of the positioning system in order to attenuate vibrations in the structure, the motion profile being determined from a motion command which is operative to drive the positioning system during the motion cycle.
2 Assignments
0 Petitions
Accused Products
Abstract
An active vibration absorber is attachable to a structure incorporating a positioning system which serves to vibrate the structure during its operation. The active vibration absorber comprises a mounting portion for attachment to the structure, an inertial mass that is resiliently coupled to the mounting portion and a force actuator which is operative to controllably move the inertial mass relative to the mounting portion. The force actuator is configured to move the inertial mass relative to the mounting body according to a motion profile during a motion cycle of the positioning system in order to attenuate vibrations in the structure. The motion profile is determined from a motion command which is operative to drive the positioning system during the motion cycle.
3 Citations
20 Claims
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1. An active vibration absorber comprising:
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a mounting portion that is attachable to a structure, the structure incorporating a positioning system which serves to vibrate the structure during its operation; an inertial mass that is resiliently coupled to the mounting portion; and a force actuator which is operative to controllably move the inertial mass relative to the mounting portion; wherein the force actuator is configured to move the inertial mass relative to the mounting body according to a motion profile during a motion cycle of the positioning system in order to attenuate vibrations in the structure, the motion profile being determined from a motion command which is operative to drive the positioning system during the motion cycle. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A semiconductor processing apparatus, comprising:
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a processing station incorporating a positioning system which serves to vibrate the processing station during its operation; an active vibration absorber having a mounting portion that is attachable to the processing station and an inertial mass that is resiliently coupled to the mounting portion; and a force actuator which is operative to controllably move the inertial mass relative to the mounting portion; wherein the force actuator is configured to move the inertial mass relative to the mounting body according to a motion profile during a motion cycle of the positioning system in order to attenuate vibrations in the processing station, the motion profile being determined from a motion command which is operative to drive the positioning system during the motion cycle.
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Specification