PROBE CARD AND METHOD FOR TESTING MAGNETIC SENSORS
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Accused Products
Abstract
A probe card and method are provided for testing magnetic sensors at the wafer level. The probe card has one or more probe tips having a first pair of solenoid coils in parallel configuration on first opposed sides of each probe tip to supply a magnetic field in a first (X) direction, a second pair of solenoid coils in parallel configuration on second opposed sides of each probe tip to supply a magnetic field in a second (Y) direction orthogonal to the first direction, and an optional third solenoid coil enclosing or inscribing the first and second pair to supply a magnetic field in a third direction (Z) orthogonal to both the first and second directions. The first pair, second pair, and third coil are each symmetrical with a point on the probe tip array, the point being aligned with and positioned close to a magnetic sensor during test.
9 Citations
35 Claims
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1-16. -16. (canceled)
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17. A method of testing a magnetic sensor with a probe card including a plurality of probe tips and first and second pairs of non-coaxial coils, comprising:
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applying a first magnetic field to the magnetic sensor with the first pair of non-coaxial coils positioned on first opposed sides of the plurality of probe tips; sensing a first output from the magnetic sensor; applying a second magnetic field to the magnetic sensor with the second pair of non-coaxial coils positioned on second opposed sides of the plurality of probe tips, the second magnetic field being orthogonal to the first magnetic field at the magnetic sensor; and sensing a second output from the magnetic sensor. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35)
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Specification