HEAT RADIATION CONTROL ELEMENT AND PRODUCTION METHOD THEREOF
First Claim
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1. A heat radiation control element, comprising:
- an inorganic layer a surface of which has openings arranged two-dimensionally; and
a reflecting film,wherein the inorganic layer is either a quartz layer, or a glass layer.
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Abstract
A heat radiation control element 11, which contains an inorganic layer 21 a surface of which has openings arranged two-dimensionally, and a reflecting film 22.
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Citations
12 Claims
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1. A heat radiation control element, comprising:
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an inorganic layer a surface of which has openings arranged two-dimensionally; and a reflecting film, wherein the inorganic layer is either a quartz layer, or a glass layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A production method of a heat radiation control element, comprising:
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forming a resist pattern, in which predetermined shapes are two-dimensionally arranged, on a surface of an inorganic substrate, which is either a quartz substrate or a glass substrate; etching the surface of the inorganic substrate using the resist pattern as a mask to form two-dimensionally arranged openings at the surface of the inorganic substrate; and forming a reflecting film on a surface of the inorganic substrate that is opposite to the surface thereof where the openings are formed through vacuum deposition or sputtering.
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12. A production method of a heat radiation control element, comprising:
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laminating a dielectric film, a reflecting film, and a protective film in this order on one surface of an inorganic substrate that is either a quartz substrate or a glass substrate; forming a transparent conductive film on another surface of the inorganic substrate; forming a resist pattern, in which predetermined shapes are two-dimensionally arranged, on a surface of the transparent conductive film; and etching the surface of the inorganic substrate using the resist pattern as a mask to form two-dimensionally arranged openings at the surface of the inorganic substrate.
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Specification