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METHOD OF MANUFACTURING OXIDE CRYSTAL THIN FILM

  • US 20150225843A1
  • Filed: 11/11/2013
  • Published: 08/13/2015
  • Est. Priority Date: 06/04/2013
  • Status: Active Grant
First Claim
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1. A method for manufacturing an oxide crystal thin film, comprisingcarrying raw material fine particles to a film forming chamber by means of a carrier gas, the raw material fine particles being formed from a raw material solution comprising water and at least one of a gallium compound and an indium compound, and forming an oxide crystal thin film on a sample on which films are to be formed, the sample being placed in the film forming chamber,wherein at least one of the gallium compound and the indium compound is bromide or iodide.

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