GROWING GRAPHENE ON SUBSTRATES

• US 20150235847A1
• Filed: 10/24/2013
• Published: 08/20/2015
• Est. Priority Date: 10/25/2012
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Beasley, Cara, Hofmann, Ralf, Foad, Majeed A.
• Granted Patent: US 9,595,436 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: B05D 3/061 using U.V.
• CPC Class Codes: B05D 3/065 After-treatment
• CPC Class Codes: B05D 3/141 Plasma treatment
• CPC Class Codes: B05D 5/12 to obtain a coating with specific electrical properties
• CPC Class Codes: C01B 32/184 Preparation
• CPC Class Codes: C01B 32/186 by chemical vapour deposition [CVD]
• CPC Class Codes: H01L 21/02318 post-treatment
• CPC Class Codes: H01L 21/0234 treatment by exposure to a plasma
• CPC Class Codes: H01L 21/02345 treatment by exposure to radiation, e.g. visible light
• CPC Class Codes: H01L 21/0237 Materials
• CPC Class Codes: H01L 21/02376 Carbon, e.g. diamond-like carbon
• CPC Class Codes: H01L 21/02527 Carbon, e.g. diamond-like carbon
• CPC Class Codes: H01L 21/02628 using solutions
• CPC Class Codes: H01L 21/02664 Aftertreatments planarisation in general H01L21/304
• CPC Class Codes: H01L 21/288 from a liquid, e.g. electrolytic deposition

Abstract

Embodiments described herein provide methods and apparatus for forming graphitic carbon such as graphene on a substrate. The method includes providing a precursor comprising a linear conjugated hydrocarbon, depositing a hydrocarbon layer from the precursor on the substrate, and forming graphene from the hydrocarbon layer by applying energy to the substrate. The precursor may include template molecules such as polynuclear aromatics, and may be deposited on the substrate by spinning on, by spraying, by flowing, by dipping, or by condensing. The energy may be applied as radiant energy, thermal energy, or plasma energy.

Claims

1. A method of growing graphitic carbon on a substrate, comprising:

providing a precursor comprising a linear conjugated hydrocarbon;

depositing a hydrocarbon layer from the precursor on a substrate; and

forming a graphitic layer from the hydrocarbon layer by applying energy to the hydrocarbon layer.

2. The method of claim 1, wherein the precursor further comprises a polynuclear aromatic compound.

3. The method of claim 1, wherein depositing the hydrocarbon layer on the substrate comprises adhering molecules from the precursor to a surface of the substrate.

4. The method of claim 3, wherein the precursor further comprises a template.

5. The method of claim 4, wherein the precursor further comprises a solvent.

6. The method of claim 4, wherein the precursor has a viscosity less than about 3.0 cP at room temperature.

7. The method of claim 1, wherein depositing the hydrocarbon layer from the precursor on the substrate comprises applying the precursor to the substrate as a liquid.

8. The method of claim 5, further comprising removing the solvent before applying the energy to the substrate.

9. The method of claim 1, wherein the energy is selected from the group consisting of UV energy, plasma energy, thermal energy, and combinations thereof.

10. The method of claim 8, wherein the precursor has a viscosity less than about 3.0 cP at room temperature.

11. The method of claim 1, wherein the precursor further comprises an oxygen-containing solvent.

12. The method of claim 11, wherein the hydrocarbon layer contains trace quanitities of the oxygen-containing solvent.

13. The method of claim 1, wherein the linear conjugated hydrocarbon is a diene having four or more carbon atoms.

14. The method of claim 13, wherein the precursor further comprises a polynuclear aromatic compound.

15. The method of claim 1, wherein the graphitic carbon layer is at least about 80% graphene.