WIRING STRUCTURE AND METHOD OF MANUFACTURING THE SAME
First Claim
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1. A wiring structure, wherein carbon nanotubes and graphene are electrically connected via a metal block.
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Abstract
A wiring structure is made up by electrically connecting a via part made up by forming CNTs in a via hole and a wiring part made up of multilayer graphene on an interlayer insulating film via a metal block such as Cu. In the wiring structure using the CNTs at the via part and the graphene at the wiring part, it is thereby possible to obtain the wiring structure with high reliability enabling a certain electrical connection between the CNTs and the graphene with a relatively simple configuration.
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Citations
19 Claims
- 1. A wiring structure, wherein carbon nanotubes and graphene are electrically connected via a metal block.
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9. A manufacturing method of a wiring structure, comprising:
electrically connecting carbon nanotubes and graphene via a metal block. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
Specification