Gas Supply Manifold And Method Of Supplying Gases To Chamber Using Same
First Claim
1. A gas inlet system for a wafer processing reactor, comprising:
- a tubular gas manifold conduit adapted to be connected to a gas inlet port of the wafer processing reactor for supplying a gas mixed in the tubular gas manifold conduit to the wafer processing reactor; and
gas feeds comprising a first feed for feeding a first gas into the tubular gas manifold conduit and a second feed for feeding a second gas into the tubular gas manifold conduit, each teed having two or more injection ports connected to the tubular gas manifold conduit at a first axial position of the tubular gas manifold conduit,wherein the injection ports of each of the gas feeds are evenly distributed along a circumference of the tubular gas manifold conduit at the first axial position.
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Accused Products
Abstract
A gas inlet system for a wafer processing reactor includes a tubular gas manifold conduit adapted to be connected to a gas inlet port of the wafer processing reactor; and gas feeds including a first feed for feeding a first gas into the tubular gas manifold conduit and a second feed for feeding a second gas into the tubular gas manifold conduit. Each feed has two or more injection ports connected to the tubular gas manifold conduit at a first axial position of the tubular gas manifold conduit, and the injection ports of each of the gas feeds are evenly distributed along a circumference of the tubular gas manifold conduit at the first axial position.
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Citations
20 Claims
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1. A gas inlet system for a wafer processing reactor, comprising:
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a tubular gas manifold conduit adapted to be connected to a gas inlet port of the wafer processing reactor for supplying a gas mixed in the tubular gas manifold conduit to the wafer processing reactor; and gas feeds comprising a first feed for feeding a first gas into the tubular gas manifold conduit and a second feed for feeding a second gas into the tubular gas manifold conduit, each teed having two or more injection ports connected to the tubular gas manifold conduit at a first axial position of the tubular gas manifold conduit, wherein the injection ports of each of the gas feeds are evenly distributed along a circumference of the tubular gas manifold conduit at the first axial position. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification