MICRO ELECTRO MECHANICAL SYSTEMS SENSOR

• US 20150241215A1
• Filed: 01/21/2015
• Published: 08/27/2015
• Est. Priority Date: 02/27/2014
• Status: Abandoned Application

• Current Assignee: Samsung Electro-Mechanics Co., Ltd. (Samsung Group)
• Original Assignee: Samsung Electro-Mechanics Co., Ltd. (Samsung Group)
• Inventors: Kim, Jong Woon, Han, Seung Hun, Lee, Sung Jun, Kim, Sung Wook, Lim, Chang Hyun
• Application Number:
  US14/602,031
• Publication Number:
  US 20150241215A1
• Time in Patent Office: Days
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2203/0163 Spring holders
• CPC Class Codes: B81B 3/0072 For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
• CPC Class Codes: G01C 19/5755 the devices having a single sensing mass
• CPC Class Codes: G01P 15/123 by piezo-resistive elements, e.g. semiconductor strain gauges
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/0831 the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
• CPC Class Codes: G01P 2015/084 the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
• CPC Class Codes: G01P 2015/0842 the mass being of clover leaf shape

Abstract

Embodiments of the invention provide a MEMS sensor, including a mass body, a flexible beam coupled with the mass body, and a support part coupled with the flexible beam and floatably supporting the mass body. According to at least one embodiment, the flexible beam is provided with a sensing device configured to detect a physical amount depending on a displacement of the mass body, and a connection part between the flexible beam and the support part is provided with a reinforcement part to relax stress concentration in response to rigidity reinforcement.

Claims

1. A micro electro mechanical systems sensor, comprising:

a mass body;

a flexible beam coupled with the mass body; and

a support part coupled with the flexible beam and floatably supporting the mass body,

wherein the flexible beam is provided with a sensing device configured to detect a physical amount depending on a displacement of the mass body, and a connection part between the flexible beam and the support part is provided with a reinforcement part to relax stress concentration in response to rigidity reinforcement.

2. The micro electro mechanical systems sensor as set forth in claim 1, wherein the reinforcement part is formed to cover the connection part.

3. The micro electro mechanical systems sensor as set forth in claim 1, wherein the reinforcement part is made of high-rigidity materials including at least one of metal and ceramic.

4. The micro electro mechanical systems sensor as set forth in claim 1, wherein the reinforcement part has a predetermined thickness and an edge thereof is provided with a chamfer or a fillet.

5. The micro electro mechanical systems sensor as set forth in claim 1, wherein the sensing device is formed to be adjacent to an end of the reinforcement part.

6. A micro electro mechanical systems sensor, comprising:

a mass body;

a flexible beam coupled with the mass body; and

a support part coupled with the flexible beam and floatably supporting the mass body,

wherein the flexible beam is provided with a first sensing device and a second sensing device configured to detect a physical amount depending on a displacement of the mass body, a connection part between the flexible beam and the support part is provided with a first reinforcement part to relax stress concentration in response to rigidity reinforcement, and a connection part between the flexible beam and the mass body is provided with a second reinforcement part to relax stress concentration in response to rigidity reinforcement.

7. The micro electro mechanical systems sensor as set forth in claim 6, wherein the first reinforcement part and the second reinforcement part are each formed to cover the connection part.

8. The micro electro mechanical systems sensor as set forth in claim 6, wherein the first reinforcement part and the second reinforcement part are made of high-rigidity materials including at least one of metal and ceramic.

9. The micro electro mechanical systems sensor as set forth in claim 6, wherein the first reinforcement part and the second reinforcement part have a predetermined thickness and edges thereof are provided with a chamfer or a fillet.

10. The micro electro mechanical systems sensor as set forth in claim 6, wherein the first sensing device is formed to be adjacent to an end of the first reinforcement part and the second sensing device is formed to be adjacent to an end of the second reinforcement part.

11. A micro electro mechanical systems sensor, comprising:

a first sensor unit comprising a mass body, a flexible beam coupled with the mass body, and a support part coupled with the flexible beam and floatably supporting the mass body, wherein the flexible beam is provided with a sensing device for detecting a physical amount depending on a displacement of the mass body and a connection part between the flexible beam and the support part is provided with a reinforcement part to relax stress concentration in response to rigidity reinforcement; and

a second sensor unit comprising the mass body, the flexible beam coupled with the mass body, and the support part coupled with the flexible beam and floatably supporting the mass body, wherein the flexible beam is provided with a sensing device configured to detect the displacement of the mass body, wherein the sensing device of the second sensor unit is formed of a piezoelectric material and the reinforcement part of the first sensor unit is formed of the piezoelectric material.

12. The micro electro mechanical systems sensor as set forth in claim 11, wherein the flexible beam of the first sensor unit is provided with a first sensing device and a second sensing device configured to detect a physical amount depending on a displacement of the mass body, a connection part between the flexible beam of the first sensor unit and the support part is provided with a first reinforcement part to relax stress concentration in response to rigidity reinforcement, and a connection part between the flexible beam of the first sensor unit and the mass body is provided with a second reinforcement part to relax stress concentration in response to rigidity reinforcement.

13. The micro electro mechanical systems sensor as set forth in claim 12, wherein the first reinforcement part and the second reinforcement part are each formed to cover the connection part.

14. The micro electro mechanical systems sensor as set forth in claim 12, wherein the first reinforcement part and the second reinforcement part have a predetermined thickness and edges thereof are provided with a chamfer or a fillet.

15. The micro electro mechanical systems sensor as set forth in claim 12, wherein the first sensing device is formed to be adjacent to an end of the first reinforcement part and the second sensing device is formed to be adjacent to an end of the second reinforcement part.

16. The micro electro mechanical systems sensor as set forth in claim 12, wherein the second sensor unit further comprises a driving device for driving the mass body.

17. The micro electro mechanical systems sensor as set forth in claim 16, wherein the driving device is formed of a piezoelectric material.