Pilot Valve Structures and Mass Flow Controllers

• US 20150247586A1
• Filed: 02/28/2014
• Published: 09/03/2015
• Est. Priority Date: 02/28/2014
• Status: Active Grant

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Gomes, Richard II
• Granted Patent: US 9,476,517 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: F16K 31/128 servo actuated
• CPC Class Codes: F16K 31/385 the fluid acting on a diaphragm
• CPC Class Codes: F16K 31/404 the discharge being effected through the diaphragm and being blockable by an electrically-actuated member making contact with the diaphragm
• CPC Class Codes: G05D 7/0635 by action on throttling means G05D7/0688, G05D7/0694 take precedence
• CPC Class Codes: Y10T 137/7759 Responsive to change in rate of fluid flow
• CPC Class Codes: Y10T 137/7768 Pilot controls supply to pressure chamber

Abstract

Pilot valve structures are described as including a main valve having a main flow body and having an inlet and outlet, and a diaphragm, with a perimeter, a moveable portion, and first and second sides. A main flow orifice is located in the flow body between the inlet and outlet. A main valve plug is attached to and/or disposed in the moveable portion of the diaphragm and opens and closes the flow orifice when the moveable portion of the diaphragm is in first and second positions. The pilot valve also includes a pilot valve inlet that is connected to the flow path of the main flow body. A pilot valve outlet/orifice is disposed within and co-located with the main valve plug. The pilot valve includes a pilot valve plug, which is moveable to open and close the pilot valve orifice. Related mass flow controllers with such pilot valve structures are further described.

Claims

1. A pilot valve assembly comprising:

a main valve having (i) a main flow body defining a flow path for a fluid and having an inlet and outlet, (ii) a diaphragm, with a perimeter, a moveable portion, and first and second sides, wherein the perimeter of the diaphragm is fixed with respect to the valve body, and wherein the moveable portion is operative to move in response to a pressure differential existing between the first and second sides, (iii) a main flow orifice in the flow body between the inlet and outlet, and (iv) a main valve plug attached to the moveable portion of the diaphragm and operative to open and close the flow orifice when the moveable portion of the diaphragm is in first and second positions, respectively;

a pilot valve having (i) a pilot valve flow body defining a flow path and having a pilot valve inlet connected to the flow path of the main flow body upstream of the main flow orifice, (ii) a pilot valve outlet including an orifice disposed within the main valve plug, wherein the pilot valve orifice has a cross-sectional area and is configured to permit fluid flow from the pilot inlet to the main flow orifice, and (iii) a pilot valve plug moveable along a range of positions from a first position to a second position and operative to open and close the pilot valve flow orifice when the pilot valve plug is in first and second positions, respectively;

wherein the pilot valve orifice is co-located with and integral to the main valve plug; and

a pilot valve solenoid connected to the pilot valve plug and operative to control the position of the pilot valve plug along the range of positions in response to a received command signal.

2. The pilot valve structure of claim 1, wherein the pilot valve inlet has a cross-sectional area less than the cross-sectional area of the pilot valve orifice.

3. The pilot valve structure of claim 1, wherein the pilot valve outlet comprises an outlet channel having an end proximal to the pilot valve plug and an end distal to the pilot valve plug, and wherein the proximal end of the outlet channel has a cross-sectional area that is less than or equal to the cross-sectional area of the distal end of the outlet channel.

4. The pilot valve assembly of claim 3, wherein the outlet channel has a conical profile.

5. The pilot valve assembly of claim 2, wherein the ratio between the cross-sectional area of the pilot valve inlet to the cross-sectional area of the pilot valve orifice is selected such that the pilot valve creates differential pressure between the first and second sides of the diaphragm.

6. The pilot valve assembly of claim 5, wherein the ratio is in the range of 0.2 to 0.7.

7. The pilot valve assembly of claim 5, wherein the range of operational pressures on the inlet side is between 22 psia and 55 psia.

8. A mass flow controller with pilot valve, comprising:

(A) a mass flow sensor operative to sense flow through a conduit and to provide a signal indicative of the sensed flow;

(B) a control valve connected to the conduit, and having a main valve having (i) a main flow body defining a flow path for a fluid and having an inlet and outlet, (ii) a diaphragm, with a perimeter, a moveable portion, and first and second sides, wherein the perimeter of the diaphragm is fixed with respect to the valve body, and wherein the moveable portion is operative to move in response to a pressure differential existing between the first and second sides, (iii) a main flow orifice in the flow body between the inlet and outlet, and (iv) a main valve plug attached to the moveable portion of the diaphragm and operative to open and close the flow orifice when the moveable portion of the diaphragm is in first and second positions, respectively;

(C) a pilot valve having (i) a pilot valve flow body defining a flow path and having a pilot valve inlet connected to the flow path of the main flow body upstream of the main flow orifice, (ii) a pilot valve outlet including an orifice disposed within the main valve plug, wherein the pilot valve orifice has a cross-sectional area and is configured to permit fluid flow from the pilot inlet to the main flow orifice, (iii) a pilot valve plug moveable along a range of positions from a first position to a second position and operative to open and close the pilot valve flow orifice when the pilot valve plug is in first and second positions, respectively; and

(iv) a pilot valve solenoid connected to the pilot valve plug and operative to control the position of the pilot valve plug along the range of positions in response to a received command signal;

wherein the pilot valve orifice is co-located with and integral to the main valve plug; and

(D) a controller operative to receive a setpoint command signal, receive a signal indicative of mass flow from the mass flow sensor, and control a mass flow output of the mass flow controller by controlling the pilot valve solenoid to move the pilot valve plug.

9. The mass flow controller of claim 8, wherein the pilot valve inlet has a cross-sectional area less than the cross-sectional area of the pilot valve orifice

10. The mass flow controller of claim 8, wherein the pilot valve outlet comprises an outlet channel having an end proximal to the pilot valve plug and an end distal to the pilot valve plug, and wherein the proximal end of the outlet channel has a cross-sectional area that is less than or equal to the cross-sectional area of the distal end of the outlet channel.

11. The mass flow controller of claim 10, wherein the outlet channel has a conical profile.

12. The mass flow controller of claim 9, wherein the ratio between the cross-sectional area of the pilot valve inlet to the cross-sectional area of the pilot valve orifice is selected such that that the pilot valve creates differential pressure between the first and second sides of the diaphragm.

13. The mass flow controller of claim 12, wherein the ration is in the range of 0.2 to 0.7.

14. The mass flow controller of claim 12, wherein the range of operational pressures on the inlet side is between 22 psia and 55 psia.