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METHOD OF PATTERNING PILLARS

  • US 20150251917A1
  • Filed: 06/10/2014
  • Published: 09/10/2015
  • Est. Priority Date: 10/21/2013
  • Status: Abandoned Application
First Claim
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1. A method of forming pillars, comprising:

  • providing a substrate;

    providing a plurality of beads on a surface of the substrate, wherein regions of the surface without a directly overlying bead are exposed; and

    selectively etching the exposed regions of the substrate between the beads such that a plurality of pillars is formed under areas masked by the beads,wherein selectively etching completely removes at least some of the beads.

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