METHOD OF PATTERNING PILLARS
First Claim
1. A method of forming pillars, comprising:
- providing a substrate;
providing a plurality of beads on a surface of the substrate, wherein regions of the surface without a directly overlying bead are exposed; and
selectively etching the exposed regions of the substrate between the beads such that a plurality of pillars is formed under areas masked by the beads,wherein selectively etching completely removes at least some of the beads.
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Accused Products
Abstract
The disclosed technology relates to methods of patterning elongated structures. In one aspect, a method of forming pillars includes providing a substrate and providing a plurality of beads on a surface of the substrate. Regions of the surface without a directly overlying bead are exposed. The method additionally includes selectively etching the exposed regions of the substrate between the beads such that a plurality of pillars is formed under areas masked by the beads. Selectively etching completely removes at least some of the beads. The pillars that are not covered by beads are etched, thereby leaving some pillars taller than others, with the pillar height pending on the amount of time a pillar was left exposed to etchant by a removed bead.
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Citations
22 Claims
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1. A method of forming pillars, comprising:
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providing a substrate; providing a plurality of beads on a surface of the substrate, wherein regions of the surface without a directly overlying bead are exposed; and selectively etching the exposed regions of the substrate between the beads such that a plurality of pillars is formed under areas masked by the beads, wherein selectively etching completely removes at least some of the beads. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method for forming pillars, comprising:
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providing a substrate; providing an etch mask on the surface of the substrate, the etch mask including a plurality of islands of masking material, wherein some of the islands have different widths than others of the island; etching the substrate through the etch mask to form a plurality of pillars. - View Dependent Claims (18, 19, 20, 21, 22)
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Specification