Passive Pressure Sensing
First Claim
1. A pressure sensor for sensing pressure of a fluid, the pressure sensor comprising:
- a diaphragm flexure;
a crystal retaining flexure, wherein the diaphragm flexure is designed to exert imparted force on the crystal retaining flexure and wherein the imparted force is proportional to fluid pressure exerted on the diaphragm flexure; and
a resonator having opposing curved end portions connected to each other by a bridge section, wherein a portion of the crystal retaining flexure is positioned between the diaphragm flexure and the resonator, and wherein the crystal retaining flexure is designed to exert a load on the resonator, the load resulting from the imparted force exerted on the crystal retaining flexure by the diaphragm flexure.
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Abstract
A pressure sensor for sensing pressure of a fluid includes a diaphragm flexure and a crystal retaining flexure. The diaphragm flexure is designed to exert imparted force on the crystal retaining flexure. The imparted force is proportional to fluid pressure exerted on the diaphragm flexure. The pressure sensor further includes a resonator having opposing curved end portions connected to each other by a bridge section. A portion of the crystal retaining flexure is positioned between the diaphragm flexure and the resonator. The crystal retaining flexure is designed to exert a load on the resonator. The load results from the imparted force exerted on the crystal retaining flexure by the diaphragm flexure.
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Citations
20 Claims
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1. A pressure sensor for sensing pressure of a fluid, the pressure sensor comprising:
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a diaphragm flexure; a crystal retaining flexure, wherein the diaphragm flexure is designed to exert imparted force on the crystal retaining flexure and wherein the imparted force is proportional to fluid pressure exerted on the diaphragm flexure; and a resonator having opposing curved end portions connected to each other by a bridge section, wherein a portion of the crystal retaining flexure is positioned between the diaphragm flexure and the resonator, and wherein the crystal retaining flexure is designed to exert a load on the resonator, the load resulting from the imparted force exerted on the crystal retaining flexure by the diaphragm flexure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A system for measuring a pressure of a fluid, the system comprising:
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a signal source; a signal receiver; and a pressure sensor comprising; a diaphragm flexure; a crystal retaining flexure, wherein the diaphragm flexure is designed to exert imparted force on the crystal retaining flexure, wherein the imparted force is proportional to fluid pressure exerted on the diaphragm flexure; and a resonator having opposing curved end portions connected to each other by a bridge section, wherein a portion of the crystal retaining flexure is positioned between the diaphragm flexure and the resonator, and wherein the crystal retaining flexure is designed to exert a load on the resonator, the load resulting from the imparted force exerted on the crystal retaining flexure by the diaphragm flexure, and wherein the resonator is electrically coupled to the signal source and to the signal receiver. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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17. A method for measuring a pressure of a fluid, the method comprising:
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generating a signal by a signal source; receiving the signal by a signal receiver through a pressure sensor; processing the signal to determine the pressure sensed by the pressure sensor, the pressure sensor comprising; a diaphragm flexure; a crystal retaining flexure; and a resonator having opposing curved end portions connected to each other by a bridge section, wherein a portion of the crystal retaining flexure is positioned between the diaphragm flexure and the resonator, wherein the crystal retaining flexure is designed to exert a load on the resonator, the load resulting from an imparted force exerted on the crystal retaining flexure by the diaphragm flexure, and wherein receiving the signal through the pressure sensor comprises receiving the signal through the resonator. - View Dependent Claims (18, 19, 20)
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Specification