ACCELERATION SENSOR
1 Assignment
0 Petitions
Accused Products
Abstract
An acceleration sensor includes: an X detection portion that detects acceleration in an X direction by swinging a first movable electrode about a pair of beam portions; a Y detection portion that detects acceleration in a Y direction perpendicular to the X direction by swinging a second movable electrode about a pair of beam portions; and a Z detection portion that detects acceleration in a Z direction by moving a third movable electrode, which is held by two pairs of beam portions in parallel in the vertical direction, characterized in that the X detection portion, the Y detection portion and the Z detection portion are arranged in one chip.
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Citations
22 Claims
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1-12. -12. (canceled)
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13. An acceleration sensor comprising:
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a first detection portion including a first beam portion and a first movable electrode connected to the first beam portion; a second detection portion including a second beam portion and a second movable electrode connected to the second beam portion; a third detection portion including a third beam portion and a third movable electrode connected to the third beam portion; a support portion that connects the first beam portion, the second beam portion and the third beam portion to one another; a first substrate connected to the support portion; and a second substrate connected to the support portion, wherein, between the third detection portion and the first detection portion, the support portion is separated from the first substrate in the vicinity of a connection portion thereof to the third beam portion, and between the third detection portion and the second detection portion, the support portion is separated from the first substrate in the vicinity of a connection portion thereof to the third beam portion. - View Dependent Claims (14, 15, 16, 17)
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18. An acceleration sensor comprising:
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a first detection portion including a first beam portion and a first movable electrode connected to the first beam portion; a second detection portion including a second beam portion and a second movable electrode connected to the second beam portion; a third detection portion including a third beam portion and a third movable electrode connected to the third beam portion; a support portion that connects the first beam portion, the second beam portion and the third beam portion to one another; a first substrate connected to the support portion; and a second substrate connected to the support portion, wherein the support portion includes through portions on both sides of the third movable electrode. - View Dependent Claims (19, 20, 21, 22)
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Specification