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Micro Pump Systems

  • US 20150267695A1
  • Filed: 02/26/2015
  • Published: 09/24/2015
  • Est. Priority Date: 02/28/2014
  • Status: Active Grant
First Claim
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1. A micro-pump comprising:

  • a pump body, the pump body having a pump chamber that is compartmentalized into plural compartments, with the pump chamber having a first plurality of inlet ports providing fluid ingress into the pump chamber and a second plurality of outlet ports providing fluid egress from the pump chamber;

    a third plurality of membranes disposed in the pump chamber, with the third plurality of membranes anchored between opposing walls of the pump body and providing the plural compartments with the pump chamber; and

    a fourth plurality of electrodes, with a first pair of the fourth plurality of electrodes disposed on a second different pair of opposing walls of the pump body, and a remaining ones of the fourth plurality of electrodes disposed on major surfaces of the membranes.

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