ELECTRONIC DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT

• US 20150268266A1
• Filed: 03/16/2015
• Published: 09/24/2015
• Est. Priority Date: 03/18/2014
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: FURUHATA, Makoto
• Granted Patent: US 9,829,505 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: G01C 19/5783 Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
• CPC Class Codes: G01P 15/08 with conversion into electric or magnetic values
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/48227 connecting the wire to a bond pad of the item
• CPC Class Codes: H01L 2224/49109 outside the semiconductor or solid-state body
• CPC Class Codes: H01L 2224/73265 Layer and wire connectors
• CPC Class Codes: H01L 2924/00012 Relevant to the scope of the group, the symbol of which is combined with the symbol of this group
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/181 Encapsulation

Abstract

An electronic device includes an accommodation space formed between a first base material and a second base material so as to seal a space therebetween, and a functional element in the accommodation space. The accommodation space is formed in an inner region of a bonding portion between the first base material and the second base material. The electronic device includes wirings extending from the inner region through the bonding portion to the outside of the accommodation space. The bonding portion includes a first bonding region and a second bonding region. The wiring includes a first wiring portion having a first direction toward the outside through the first bonding region from the inner region and a second wiring portion having a second direction toward the outside through the second bonding region from the inner region. The first and the second directions are different.

Claims

1. An electronic device comprising:

a first base material;

a second base material, having an accommodation space formed between the first base material and the second base material, which is bonded to the first base material through a bonding portion; and

a functional element which is accommodated in the accommodation space,

wherein the first base material or the second base material is provided with a wiring which is electrically connected to the functional element and extends to the outside of the accommodation space through the bonding portion,

wherein the bonding portion includes a first bonding region and a second bonding region, and

wherein the wiring includes a first wiring portion having a first direction toward the outside of the accommodation space through the first bonding region and a second wiring portion having a second direction toward the outside of the accommodation space through the second bonding region, and the first direction and the second direction are different directions.

2. The electronic device according to claim 1, wherein at least one of the first wiring portion and the second wiring portion includes a plurality of wirings.

3. The electronic device according to claim 1,

wherein the first base material or the second base material includes a partition wall portion, and the accommodation space is partitioned into a first accommodation space and a second accommodation space by the partition wall portion,

wherein the functional element includes a first functional element and a second functional element,

wherein the first accommodation space accommodates the first functional element,

wherein the second accommodation space accommodates the second functional element, and

wherein the first accommodation space and the second accommodation space have different internal environments.

4. The electronic device according to claim 3,

wherein the first functional element is an angular velocity sensor element, and the second functional element is an acceleration sensor element, and

wherein the internal environment of the first accommodation space has a decompressed atmosphere, and the internal environment of the second accommodation space has a barometric atmosphere.

5. The electronic device according to claim 1,

wherein at least one of the first base material and the second base material has at least one groove portion in at least one of the first bonding region and the second bonding region, and

wherein at least one of the first wiring portion and the second wiring portion is disposed in the groove portion.

6. The electronic device according to claim 1, wherein the first bonding region and the second bonding region are disposed opposite to each other through the accommodation space.

7. The electronic device according to claim 3, wherein the first bonding region is provided on the first accommodation space side with respect to the partition wall portion, and the second bonding region is provided on the second accommodation space side with respect to the partition wall portion.

8. The electronic device according to claim 1, wherein the number of wirings provided in the first wiring portion is the same as the number of wirings provided in the second wiring portion.

9. The electronic device according to claim 4, wherein the angular velocity sensor detects a plurality of rotation axes.

10. The electronic device according to claim 4, wherein the acceleration sensor detects a plurality of axial directions.

11. An electronic apparatus comprising the electronic device according to claim 1.

12. An electronic apparatus comprising the electronic device according to claim 2.

13. An electronic apparatus comprising the electronic device according to claim 3.

14. An electronic apparatus comprising the electronic device according to claim 4.

15. An electronic apparatus comprising the electronic device according to claim 5.

16. A moving object comprising the electronic device according to claim 1.

17. A moving object comprising the electronic device according to claim 2.

18. A moving object comprising the electronic device according to claim 3.

19. A moving object comprising the electronic device according to claim 4.

20. A moving object comprising the electronic device according to claim 5.