ELECTRO DISCHARGE MACHINING SYSTEM AND METHOD OF OPERATION THEREOF

• US 20150273600A1
• Filed: 10/25/2013
• Published: 10/01/2015
• Est. Priority Date: 10/25/2012
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Ozkeskin, Fatih Mert
• Application Number:
  US14/438,221
• Publication Number:
  US 20150273600A1
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: B23H 1/00 Electrical discharge machining, i.e. removing metal with a series of rapidly recurring electrical discharges between an electrode and a workpiece in the presence of a fluid dielectric
• CPC Class Codes: B23H 1/04 Electrodes specially adapted therefor or their manufacture B23H9/00 takes precedence
• CPC Class Codes: B23H 11/003 Mounting of workpieces, e.g. working-tables
• CPC Class Codes: B23H 5/02 Electrical discharge machining combined with electrochemical machining
• CPC Class Codes: B23H 7/26 Apparatus for moving or positioning electrode relatively to workpiece; Mounting of electrode
• CPC Class Codes: B23H 9/00 Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects heat treatment by cathodic discharge C21D1/38
• CPC Class Codes: B23H 9/008 Surface roughening or texturing
• CPC Class Codes: B23H 9/18 Producing external conical surfaces or spikes B23H9/08 takes precedence
• CPC Class Codes: Y10T 29/49002 Electrical device making

Abstract

An electro discharge machining system, and method of manufacture therefor, providing: an electro discharge machining unit and control; a workpiece holder; a tool having an electrode array formed of a plurality of geometrically shaped electrodes; and wherein the workpiece holder and the tool holder are operatively connected to the electro discharge machining unit and control for batch electro discharge machining of a workpiece to a configuration having a plurality of geometrically shaped structures.

Claims

1. A method of manufacturing an electro discharge machining system comprising:

providing an electro discharge machining unit and control;

providing a workpiece holder;

providing a tool holder for a tool having an electrode array formed of a plurality of geometrically shaped electrodes; and

operatively connecting the workpiece holder and the tool holder to the electro discharge machining unit and control for batch electro discharge machining of a workpiece to a configuration having a plurality of geometrically shaped structures.

2. The method as claimed in claim 1 further comprising providing a vibrator for vibrating the workpiece and the tool relative to each other for electro discharge machining of the workpiece to have a multiplicity of geometric shaped structures different from a configuration of the electrode array.

3. The method as claimed in claim 1 further comprising providing a vibrator for vibrating the workpiece and the tool relative to each other for electro discharge machining of the workpiece to have a multiplicity of inverted geometric shaped structures different from a configuration of the electrode array.

4. The method as claimed in claim 1 further comprising providing a container for submerging the workpiece in a non-dielectric fluid.

5. The method as claimed in claim 1 further providing stages for the workpiece holder and the tool holder for moving the workpiece and the tool relative to each other for electro discharge machining of heavily doped silicon.

6. An electro discharge machining system comprising:

an electro discharge machining unit and control;

a workpiece holder;

a tool holder for a tool having an electrode array formed of a plurality of geometrically shaped electrodes; and

wherein the workpiece holder and the tool holder are operatively connected to the electro discharge machining unit and control for batch electro discharge machining of a workpiece to a configuration having a plurality of geometrically shaped structures.

7. The system as claimed in claim 6 further comprising a vibrator for vibrating the workpiece and the tool relative to each other for electro discharge machining of the workpiece to have a multiplicity of geometric shaped structures different from a configuration of the electrode array.

8. The system as claimed in claim 6 further comprising a vibrator for vibrating the workpiece and the tool relative to each other for electro discharge machining of the workpiece to have a multiplicity of inverted geometric shaped structures different from a configuration of the electrode array.

9. The system as claimed in claim 6 further comprising a container for submerging the workpiece in a non-dielectric fluid.

10. The system as claimed in claim 6 further comprising stages for the workpiece holder and the tool holder for moving the workpiece and the tool relative to each other for electro discharge machining of heavily doped silicon.

16. The system as claimed in claim 6 wherein the electrode array includes a plurality of pyramidal electrodes for batch electro discharge machining of the workpiece.

17. The system as claimed in claim 16 further comprising a vibrator for vibrating the workpiece and the tool relative to each other under 1 nm for electro discharge machining of a different pyramidal structure in the workpiece from a configuration of the electrode array.

18. The system as claimed in claim 16 further comprising a vibrator for vibrating the workpiece and the tool relative to each other under 1 nm for electro discharge machining of a different inverted pyramidal structure in the workpiece from a configuration of the electrode array.

19. The system as claimed in claim 16 further comprising a container for submerging the workpiece and the tool in a non-dielectric chemical fluid.

20. The system as claimed in claim 16 further comprising an X-Y stage for the workpiece holder for moving a container for a silicon workpiece and a Z stage for the tool holder for moving the tool and the workpiece relative to each other for electro discharge machining down to distances less than 0.1 μ

m.

11. A method of manufacturing an electro discharge machining system comprising:

providing a micro electro discharge machining unit and control for providing and controlling an electro discharge;

providing a workpiece holder for holding a workpiece;

providing a tool holder for holding a tool having an electrode array including a plurality of pyramidal electrodes; and

operatively connecting the workpiece holder and the tool holder to the electro discharge machining unit and control for batch electro discharge machining of a workpiece to a configuration having a plurality of inverted pyramidal structures.

12. The method as claimed in claim 11 further comprising providing a vibrator for vibrating the workpiece and the tool relative to each other under 1 nm for electro discharge machining of a different pyramidal structure in the workpiece from a configuration of the electrode array.

13. The method as claimed in claim 11 further comprising providing a vibrator for vibrating the workpiece and the tool relative to each other at under 1 nm for electro discharge machining of a different inverted pyramidal structures in the workpiece from a configuration of the electrode array.

14. The method as claimed in claim 11 further comprising providing a container for submerging the workpiece and the tool in a non-dielectric chemical fluid.

15. The method as claimed in claim 11 further comprising providing an X-Y stage for the workpiece holder for moving a container for a silicon workpiece and a Z stage for the tool holder for moving the tool and the workpiece relative to each other for electro discharge machining down to distances less than 0.1 μ

m.