CORRECTION DEVICE AND CORRECTION METHOD FOR OPTICAL MEASURING APPARATUS

• US 20150276390A1
• Filed: 03/25/2015
• Published: 10/01/2015
• Est. Priority Date: 03/28/2014
• Status: Active Grant

• Current Assignee: Mitutoyo Corporation
• Original Assignee: Mitutoyo Corporation
• Inventors: IMAIZUMI, Ryoichi, TANIGUCHI, Ichiro
• Granted Patent: US 9,958,263 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: G01B 11/08 for measuring diameters
• CPC Class Codes: G01B 11/2433 for measuring outlines by shadow casting
• CPC Class Codes: G01B 11/2504 Calibration devices
• CPC Class Codes: G01B 11/2518 Projection by scanning of the object

Abstract

A correction device for an optical measuring apparatus obtains correction data for each scanning position of a light beam from an optical measuring apparatus that includes a light beam scanner which scans with a light beam a measuring region where a measured object is placed, and a light receiver which receives a transmitted light beam from the measuring region. The correction device includes a translucent scale having scale marks arranged at a predetermined pitch, and a support to mount the scale in the measuring region so that an arrangement direction of the scale marks is a scanning direction of the light beam.

Claims

1. A correction device for an optical measuring apparatus that includes a light beam scanner which scans with a light beam a measuring region where a measured object is placed, and a light receiver which receives a transmitted light beam from the measuring region, the correction device configured to obtain correction data for each scanning position of the light beam from the optical measuring apparatus, the correction device comprising:

a translucent scale having scale marks arranged at a predetermined pitch; and

a support configured to mount the scale in the measuring region such that an arrangement direction of the scale marks is a scanning direction of the light beam.

2. A correction method for an optical measuring apparatus that includes a light beam scanner which scans with a light beam a measuring region where a measured object is placed, and a light receiver which receives a transmitted light beam from the measuring region, the correction method comprising:

arranging a translucent scale having scale marks arranged at a predetermined pitch in the measuring region so that an arrangement direction of the scale marks is a scanning direction of the light beam;

measuring a pitch of the scale marks with the optical measuring apparatus; and

calculating correction data to correct a measurement result of the optical measuring apparatus based upon a difference between the measurement result and a predetermined pitch of the scale.

3. The correction method for the optical measuring apparatus according to claim 2, wherein the calculating further comprises calculating correction data for each scanning position of the light beam.

4. The correction method for the optical measuring apparatus according to claim 2, further comprising storing the correction data in table format by the optical measuring apparatus.

5. The correction method for the optical measuring apparatus according to claim 3, further comprising storing the correction data in table format by the optical measuring apparatus.