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SPAN LINE PRESSURE EFFECT COMPENSATION FOR DIAPHRAGM PRESSURE SENSOR

  • US 20150276528A1
  • Filed: 03/26/2014
  • Published: 10/01/2015
  • Est. Priority Date: 03/26/2014
  • Status: Active Grant
First Claim
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1. A differential pressure sensor for sensing a differential pressure of a process fluid, comprising:

  • a sensor body having a sensor cavity formed therein having a cavity profile; and

    a diaphragm in the sensor cavity configured to deflect in response to an applied differential pressure, the diaphragm having a diaphragm profile wherein a gap between the cavity profile and the diaphragm profile changes as a function of the differential pressure;

    wherein at least one of the cavity profile and diaphragm profile changes as a function of a line pressure to compensate for changes in the gap due to deformation of the sensor body due to the line pressure.

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