Method for Removing Foreign Substances in Charged Particle Beam Device, and Charged Particle Beam Device

• US 20150279609A1
• Filed: 10/17/2013
• Published: 10/01/2015
• Est. Priority Date: 10/18/2012
• Status: Active Grant

• Current Assignee: Hitachi High-Tech Company Limited (Hitachi, Ltd.)
• Original Assignee: Hitachi High-Technologies Corporation (Hitachi, Ltd.)
• Inventors: Kasai, Yuji, Takahashi, Masakazu, Kawano, Hajime, Tanii, Kazuma
• Granted Patent: US 9,368,319 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: H01J 2237/022 Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
• CPC Class Codes: H01J 2237/028 Particle traps
• CPC Class Codes: H01J 2237/14 magnetic
• CPC Class Codes: H01J 2237/2817 Pattern inspection
• CPC Class Codes: H01J 37/141 Electromagnetic lenses
• CPC Class Codes: H01J 37/21 Means for adjusting the focus adjusting the focus while observing the image by photographic or optical means H01J37/22; means for observing the object or the point of impact on the object in tubes for the localised treatment of materials H01J37/3005
• CPC Class Codes: H01J 37/28 with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence

Abstract

Foreign substances present in a sample chamber are attached to or drawn close to an objective lens and an electrode disposed close to the objective lens by applying a higher magnetic field than when normally used to the objective lens and applying a higher electric field than when normally used to the electrode disposed close to the objective lens. A stage is moved such that the center of an optical axis is located directly above a dedicated stand capable of applying voltage, the magnetic field of the objective lens is turned off, and then the potential difference between the electrode disposed close to the objective lens and an electrode disposed close to the sage is periodically maximized and minimized to thereby forcibly drop the foreign substances onto the dedicated stand capable of applying voltage.

Claims

1. A charged particle beam device comprising:

an objective lens to focus a charged particle beam emitted from a charged particle source;

a control unit to control strength of the objective lens;

a vacuum chamber to maintain an atmosphere around a sample to be irradiated with the charged particle beam under vacuum; and

a contamination or particle collector to retrieve contaminations or particles on a stage to which a sample is arranged or in a vacuum chamber;

wherein the control unit moves the contamination or particle collector or the stage so that the contamination or particle collector is positioned below a beam passage opening of the objective lens, and applies a voltage to an electrode and/or a magnetic pole to generate potential difference between the contamination or particle collector or the stage and the objective lens so as to form potential difference between the contamination or particle collector and the objective lens or between the stage and the objective lens while the contamination or particle collector is positioned below the beam passage opening of the objective lens.

2. The charged particle beam device according to claim 1, wherein the control unit periodically changes potential difference between the contamination or particle collector and the objective lens or between the stage and the objective lens while the contamination or particle collector is positioned below the beam passage opening of the objective lens.

3. The charged particle beam device according to claim 1, wherein the control unit generates the potential difference by controlling at least one of an applied voltage to the contamination or particle collector, an applied voltage to the stage, an applied voltage to a facing electrode facing to the sample, and an applied voltage to a boosting plate which accelerates the charged particle beam.

4. The charged particle beam device according to claim 1, wherein the control unit performs magnetization of the objective lens and/or application of a voltage to an electrode for generating potential difference between the stage and an objective lens, before the potential difference is formed.

5. The charged particle beam device according to claim 4, wherein the control unit performs magnetization of the objective lens by supplying the objective lens with a larger current as compared with a case where the sample is irradiated with the beam, before the potential difference is formed.

6. The charged particle beam device according to claim 4, wherein the control unit applies larger voltage as compared with a case where the sample is irradiated with the beam to an electrode and/or a magnetic pole to generate potential difference between the stage and an objective lens, before the potential difference is formed.

7. The charged particle beam device according to claim 1, wherein the contamination or particle collector is disposed in the stage or the vacuum chamber.

8. The charged particle beam device according to claim 7, wherein vacuum grease is applied to the contamination or particle collector.

9. The charged particle beam device according to claim 7, wherein a mesh-like electrode is provided in the contamination or particle collector.

10. A contamination or particle removing method in a charged particle beam device, for removing contaminations or particles in a vacuum chamber in the charged particle beam device, comprising the steps of:

moving a stage in which a contamination or particle collector or a sample is disposed so that the contamination or particle collector, which retrieves the contaminations or particles, is positioned below a beam passage opening of an objective lens which focuses a charged particle beam; and

forming potential difference between the contamination or particle collector or the stage and the objective lens while the contamination or particle collector is positioned below the beam passage opening of the objective lens.

11. A charged particle beam device comprising:

an objective lens to focus a charged particle beam emitted from a charged particle source;

a control unit to control strength of the objective lens;

a vacuum chamber to maintain an atmosphere around a sample to be irradiated with the charged particle beam under vacuum; and

a contamination or particle collector to retrieve contaminations or particles on a stage to which a sample is arranged or in a vacuum chamber;

wherein the control unit moves the contamination or particle collector or the stage so that the contamination or particle collector is positioned below a beam passage opening of the objective lens, and applies a voltage to an electrode and/or a magnetic pole to generate potential difference between the contamination or particle collector or the stage and the objective lens so as to form the potential difference, which changes periodically, between the contamination or particle collector and the objective lens or between the stage and the objective lens while the contamination or particle collector is positioned below the beam passage opening of the objective lens.