ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF, AND DISPLAY APPARATUS
First Claim
1. A manufacturing method of an array substrate, comprising the following steps:
- S1, forming a data line metal layer on a substrate, and forming a pattern of a data line by a patterning process;
S2, forming a semiconductor layer on the substrate formed with the data line thereon, and forming a pattern of an active layer by a patterning process, wherein the data line is connected with the active layer.
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Abstract
The present invention provides an array substrate and a manufacturing method thereof, and a display apparatus comprising the array substrate an array substrate, which can avoid poor displays due to large coupling capacitance between a data line and a pixel electrode in an array substrate in the prior art. The manufacturing method comprises the following steps: S1, forming a data line metal layer on a substrate, and forming a pattern of a data line by a patterning process; S2, forming a semiconductor layer on the substrate formed with the data line thereon, and forming a pattern of an active layer by a patterning process, wherein the data line is connected with the active layer.
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Citations
19 Claims
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1. A manufacturing method of an array substrate, comprising the following steps:
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S1, forming a data line metal layer on a substrate, and forming a pattern of a data line by a patterning process; S2, forming a semiconductor layer on the substrate formed with the data line thereon, and forming a pattern of an active layer by a patterning process, wherein the data line is connected with the active layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 18)
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- 9. An array substrate, comprising a data line and an active layer, wherein the data line is below the active layer, and the data line is connected with the active layer.
Specification