Battery Element, a Battery and a Method for Forming a Battery

• US 20150280198A1
• Filed: 03/28/2014
• Published: 10/01/2015
• Est. Priority Date: 03/28/2014
• Status: Active Grant

• Current Assignee: Infineon Technologies AG
• Original Assignee: Infineon Technologies AG
• Inventors: Weis, Rolf, Lemke, Marko
• Granted Patent: US 9,859,542 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: H01M 10/052 Li-accumulators
• CPC Class Codes: H01M 10/0562 Solid materials
• CPC Class Codes: H01M 10/058 Construction or manufacture
• CPC Class Codes: H01M 2220/20 Batteries in motive systems, e.g. vehicle, ship, plane
• CPC Class Codes: H01M 2300/0068 inorganic
• CPC Class Codes: H01M 4/131 Electrodes based on mixed oxides or hydroxides, or on mixtures of oxides or hydroxides, e.g. LiCoOx
• CPC Class Codes: H01M 4/133 Electrodes based on carbonaceous material, e.g. graphite-intercalation compounds or CFx
• CPC Class Codes: H01M 4/134 Electrodes based on metals, Si or alloys
• CPC Class Codes: H01M 4/386 Silicon or alloys based on silicon
• CPC Class Codes: H01M 4/525 of mixed oxides or hydroxides containing iron, cobalt or nickel for inserting or intercalating light metals, e.g. LiNiO2, LiCoO2 or LiCoOxFy
• CPC Class Codes: H01M 4/583 Carbonaceous material, e.g. graphite-intercalation compounds or CFx
• CPC Class Codes: H01M 4/587 for inserting or intercalating light metals
• CPC Class Codes: H01M 4/664 Ceramic materials
• CPC Class Codes: H01M 50/531 Electrode connections inside a battery casing
• CPC Class Codes: H01M 6/40 Printed batteries , e.g. thin film batteries
• CPC Class Codes: Y02E 60/10 Energy storage using batteries
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product
• CPC Class Codes: Y02T 10/70 Energy storage systems for electromobility, e.g. batteries
• CPC Class Codes: Y10T 29/49108 Electric battery cell making

Abstract

A battery element includes a substrate with a plurality of trenches extending into the substrate. At least a part of each trench of the plurality of trenches is filled with a solid state battery structure. Further, the battery element includes a front side battery element electrode arranged at a front side of the substrate and electrically connected to a first electrode layer of the solid state battery structures within the plurality of trenches. Additionally, the battery element includes a backside battery element electrode arranged at a backside of the substrate and electrically connected to a second electrode layer of the solid state battery structures within the plurality of trenches.

Claims

1. A battery element comprising:

a substrate with a plurality of trenches extending into the substrate, wherein at least a part of each trench of the plurality of trenches is filled with a solid state battery structure;

a front side battery element electrode arranged at a front side of the substrate and electrically connected to a first electrode layer of the solid state battery structures within the plurality of trenches; and

a backside battery element electrode arranged at a backside of the substrate and electrically connected to a second electrode layer of the solid state battery structures within the plurality of trenches.

2. The battery element of claim 1, wherein the trenches of the plurality of trenches extend from the front side of the substrate to the backside of the substrate.

3. The battery element of claim 1, wherein the front side battery element electrode extends along at least a half of the front side of the substrate.

4. The battery element of claim 1, wherein the backside battery element electrode extends along at least a half of the backside of the substrate.

5. The battery element of claim 1, wherein the front side battery element electrode and the backside battery element electrode comprise copper.

6. The battery element of claim 1, wherein the solid state battery structures within the trenches comprise a solid state electrolyte layer between the first electrode layer and the second electrode layer.

7. The battery element of claim 5, wherein the solid state electrolyte layer comprises lithium phosphorus oxynitride.

8. The battery element of claim 5, wherein the first electrode layer comprises an anode layer comprising carbon or silicon.

9. The battery element of claim 5, wherein the second electrode layer comprises a cathode layer comprising lithium cobalt oxide and a collector layer comprising titan nitride.

10. The battery element of claim 1, wherein the substrate comprises a thickness of more than 500 μ

m.

11. The battery element of claim 1, wherein trenches of the plurality of trenches comprise an aspect ratio larger than 10.

12. The battery element of claim 1, wherein trenches of the plurality of trenches comprise a maximal width of less than 300 μ

m.

13. The battery element of claim 1, wherein a distance between adjacent trenches of the plurality of trenches is between 2 μ

m and 300 nm.

14. The battery element of claim 1, wherein trenches of the plurality of trenches comprise a maximal depth larger than a maximal lateral dimension.

15. The battery element of claim 1, wherein the substrate is a substantially complete wafer.

16. A battery comprising a plurality of battery elements arranged in a stacked manner, wherein each battery element comprises:

a substrate with a plurality of trenches extending into the substrate, wherein at least a part of each trench of the plurality of trenches is filled with a solid state battery structure;

a front side battery element electrode arranged at a front side of the substrate and electrically connected to a first electrode layer of the solid state battery structures within the plurality of trenches; and

a backside battery element electrode arranged at a backside of the substrate and electrically connected to a second electrode layer of the solid state battery structures within the plurality of trenches.

18. The method of claim 16, further comprising depositing an auxiliary layer at the backside of the substrate before etching the trenches, wherein the trenches are etched through the substrate until the auxiliary layer is reached.

20. The method of claim 16, further comprising thinning the substrate from the backside of the substrate after forming the solid state battery structure within the trenches until the second electrode layer is uncovered at the backside of the substrate.

21. The method of claim 16, comprising stacking a plurality of battery elements so that the electrodes of neighboring battery elements are in contact with each other.

17. A method for forming a battery, the method comprising:

etching trenches into a substrate;

forming a solid state battery structure within the trenches;

forming a front side battery element electrode arranged at a front side of the substrate and electrically connected to a first electrode layer of the solid state battery structure within the trenches; and

forming a backside battery element electrode arranged at a backside of the substrate and electrically connected to a second electrode layer of the solid state battery structure within the trenches.

19. The method of claim 17, wherein the auxiliary layer is removed after forming the solid state battery structure within the trenches to uncover the second electrode layer at the backside of the substrate.