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MONITOR FOR PARTICLE INJECTOR

  • US 20150285622A1
  • Filed: 04/07/2014
  • Published: 10/08/2015
  • Est. Priority Date: 04/07/2014
  • Status: Active Grant
First Claim
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1. An assembly for delivering and monitoring delivery of particles to a material, comprising:

  • a delivery device configured to contain a particle and accelerate the particle in a desired direction;

    a volume through which the particle can pass;

    a spatial filter having mask features;

    a detector positioned to detect light emanating from the particle along a detection region within the volume, the detected light is modulated according to the mask features as the particle moves along the detection region, the detector configured to generate a time-varying signal in response to the detected light; and

    an analyzer configured to receive the time-varying signal and determine a delivery success of the particle into the material based upon characteristics of the time-varying signal.

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