FORCE FEEDBACK LOOP FOR PRESSURE SENSORS
First Claim
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1. A pressure sensor system, comprising:
- a pressure sensor configured to measure a force caused by a pressure and to generate a sensor signal based on the measured pressure force and an electrostatic force; and
a force feedback loop configured to receive the sensor signal and to generate an output signal and a feedback signal based on the sensor signal;
wherein the feedback signal is utilized to generate the electrostatic force on the pressure sensor, wherein the electrostatic force is exerted on the pressure sensor in addition to the pressure force.
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Abstract
A pressure sensor system comprises a force feedback loop. The force feedback loop is configured to receive a measured pressure sensor signal and generate a feedback signal based on the measured pressure and an electrostatic force. The electrostatic force is generated based on the feedback signal and combined with the measured force keeping the resultant sensor signal stable.
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Citations
20 Claims
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1. A pressure sensor system, comprising:
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a pressure sensor configured to measure a force caused by a pressure and to generate a sensor signal based on the measured pressure force and an electrostatic force; and a force feedback loop configured to receive the sensor signal and to generate an output signal and a feedback signal based on the sensor signal; wherein the feedback signal is utilized to generate the electrostatic force on the pressure sensor, wherein the electrostatic force is exerted on the pressure sensor in addition to the pressure force. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A signal processing system, comprising:
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an input stage configured to measure a source force and to generate a capacitive signal in response to the measured source force and an electrostatic force; a force feedback loop configured to receive the capacitive signal and to generate an output signal and a feedback driving voltage based on the capacitive signal; and a force function component configured to generate the electrostatic force based on the feedback driving voltage; wherein the electrostatic force is combined with the measured source force to generate an overall force. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method of operating a pressure sensor system comprises:
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measuring a force caused by a pressure using a pressure sensor to generate a sensor signal based on the measured pressure and an electrostatic force; generating an output signal and a feedback signal via a force feedback loop based on the sensor signal; generating the electrostatic force based on the feedback signal; and applying the electrostatic force to the pressure sensor in addition to a force caused by the measured pressure to generate the sensor signal. - View Dependent Claims (19, 20)
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Specification