PRESSURE SENSOR, AND SENSOR UNIT PROVIDED WITH SAME
1 Assignment
0 Petitions
Accused Products
Abstract
When a main body of a sensor chip (1) is in a grounded state, a shield layer (71) constituting a shield electrode formed on a circuit layer (72) is grounded through a resistor (46).
36 Citations
19 Claims
-
1-5. -5. (canceled)
-
6. A pressure sensor comprising:
-
a sensor chip comprising; a main body comprising; a movable portion provided with a plurality of pressure detection elements, the movable portion being adapted to displace in response to a pressure acting thereon; and a fixed portion that is continuous with the movable portion; a circuit formed in a first layer to be laminated on the main body, the circuit being connected to the pressure detection elements through a conductive layer; and a shield layer formed in a second layer to be laminated on the first layer; a capacitor formed between the shield layer and an output voltage line; and a resistor connected between the shield layer and a ground line, the resistor having a resistance value greater than or equal to 10 Ω and
less than or equal to 1 MΩ
. - View Dependent Claims (8, 9, 10, 11, 16, 17)
-
-
7. A pressure sensor comprising:
-
a sensor chip comprising; a main body comprising; a movable portion provided with a plurality of pressure detection elements, the movable portion being adapted to displace in response to a pressure acting thereon; and a fixed portion that is continuous with the movable portion; a circuit formed in a first layer to be laminated on the main body, the circuit being connected to the pressure detection elements through a conductive layer; and a shield layer formed in a second layer to be laminated on the first layer; a capacitor formed between the shield layer and a ground line; and a resistor connected between the shield layer and an input voltage line, the resistor having a resistance value greater than or equal to 10 Ω and
less than or equal to 1 MΩ
. - View Dependent Claims (12, 13, 14, 15, 18, 19)
-
Specification