IMPROVEMENTS IN AND RELATING TO VACUUM CONDUITS
First Claim
1. A pressure regulating apparatus for use in a vacuum pumping system having an inlet, an outlet and a conduit interposed between, and in fluid communication with, the inlet and the outlet, wherein the cross-sectional area of the conduit is greater than that required to meet the conductance requirements of the inlet and the outlet.
1 Assignment
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Accused Products
Abstract
In situations where a vacuum system is suddenly overloaded, there is a risk of mechanical damage being sustained, for example, bearing damage, gear slippage or rotor and/or stator collisions. Sudden overloads can also lead to electrical damage, for example, over-currents or power surges. Therefore a pressure regulating apparatus is provided for use in a vacuum pumping system having an inlet, an outlet and a conduit interposed between, and in fluid communication with, the inlet and the outlet, wherein the cross-sectional area of the conduit is greater than that required to meet the conductance requirements of the inlet and the outlet.
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Citations
24 Claims
- 1. A pressure regulating apparatus for use in a vacuum pumping system having an inlet, an outlet and a conduit interposed between, and in fluid communication with, the inlet and the outlet, wherein the cross-sectional area of the conduit is greater than that required to meet the conductance requirements of the inlet and the outlet.
- 4. A manifold suitable for connecting the outlet of a booster pump to the inlet of a backing pump comprising a pressure regulating apparatus having an inlet, an outlet and a conduit interposed between, and in fluid communication with, the inlet and the outlet, wherein the cross-sectional area of the conduit is greater than that required to meet the conductance requirements of the inlet and the outlet.
- 22. (canceled)
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23. A vacuum system comprising a booster pump and a backing pump, said system further comprising a pressure regulating apparatus comprising an inlet, an outlet and a conduit interposed between, and in fluid communication with, the inlet and the outlet, wherein the cross-sectional area of the conduit is greater than that required to meet the conductance requirements of the inlet and the outlet, wherein said inlet of the pressure regulating apparatus is connected to, and in fluid communication with, the outlet of said booster pump and said outlet of the pressure regulating apparatus is connected to, and in fluid communication with, the inlet of said backing pump.
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24. (canceled)
Specification