CAPACITIVE TYPE 6-AXIAL FORCE/TORQUE SENSOR
First Claim
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1. A capacitive type sensor comprising:
- a circuit board;
electrodes formed on a first surface of the circuit board; and
an electrode plate disposed above the circuit board,wherein the electrodes comprise pairs of electrodes disposed at a distance from a center of the circuit board, and the pairs of electrodes being spaced apart from each other.
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Abstract
A capacitive type sensor includes a circuit board, electrodes formed on a first surface of the circuit board, and an electrode plate disposed above the circuit board, wherein the electrodes comprise pairs of electrodes disposed from a distance from a center of the circuit board, and the pairs of electrodes being spaced apart from each other.
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Citations
20 Claims
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1. A capacitive type sensor comprising:
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a circuit board; electrodes formed on a first surface of the circuit board; and an electrode plate disposed above the circuit board, wherein the electrodes comprise pairs of electrodes disposed at a distance from a center of the circuit board, and the pairs of electrodes being spaced apart from each other. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A capacitive type sensor comprising:
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a circular circuit board; electrodes formed on a first surface of the circular circuit board; a circular electrode plate disposed above the circuit board; and an air gap formed between the first surface of the circular circuit board and the circular electrode plate, wherein the electrodes comprise pairs of linear electrodes disposed along radii of the circular circuit board, and the pairs of linear electrode being spaced apart from each other to divide the circular circuit board into equal parts. - View Dependent Claims (18, 19, 20)
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Specification